辊径对Cu-Fe-P铜合金轧制带材表面微观缺陷及性能的影响  

Effect of roller diameter on surface microscopic defects and properties of Cu-Fe-P copper alloy rolled strip

作　　者：张斌 郭宇会 杨小平 王满丰 刘飞 景琳琪 马建阳 袁晓磊 Zhang Bin;Guo Yuhui;Yang Xiaoping;Wang Manfeng;Liu Fei;Jing Linqi;Ma Jianyang;Yuan Xiaolei(Taiyuan Jinxi Chunlei Copper Co.,Ltd.,Taiyuan 030008,China)

机构地区：[1]太原晋西春雷铜业有限公司,山西太原030008

出　　处：《锻压技术》2024年第9期122-128,共7页Forging & Stamping Technology

摘　　要：为探究集成电路用框架材料金属带材表面微观缺陷的产生机理,建立了带材轧制过程中应变速率与轧辊辊径之间的关系,选取4种不同辊径的轧辊对Cu-Fe-P铜合金带材进行轧制,分析了轧后带材表面的显微凹坑缺陷的数量和状态,检测了轧制带材的抗拉强度、伸长率和显微硬度。此外,对轧制带材进行了电镀Ni实验,并利用能谱分析检测了电镀前后的表面缺陷变化。结果显示:随着辊径的增大,轧制带材的应变速率降低,带材表面显微凹坑缺陷明显减少且抗拉强度降低,但是抗拉强度波动值有所增加。经过表面电镀后,表面显微凹坑缺陷存在未被镀层覆盖的现象。采用Φ210 mm轧辊轧制的带材表面的显微凹坑缺陷最少,可为Cu-Fe-P铜合金带材的轧制工艺优化和表面质量改善提供参考。To explore the generation mechanism of microscopic defects on the surface of metal strip used as the frame material for integrated circuit,the relationship between strain rate and roller diameter during the strip rolling process was established,and four types of rollers with different diameters were selected to roll the Cu-Fe-P copper alloy strips.Then,the number and state of micro pits on the surface of rolled strip were analyzed,and the tensile strength,elongation and microhardness were detected.In addition,electroplating Ni experiments were conducted on the rolled strips,and the surface defect changes before and after electroplating were detected by energy dispersive spectroscopy.The results show that with the increasing of roller diameter,the strain rate of rolled strip decreases,the micro pits on the surface of strip significantly decreases,and the tensile strength decreases,but the fluctuation value of tensile strength increases.After surface electroplating,the micro pits on the surface of strip are not covered by the coating.Thus,the micro pits on the surface of rolled strip by the roller with Φ210 mm are minimized,which can provide reference for the optimization of rolling process and the improvement of the surface quality of Cu-Fe-P copper alloy strip.

关 键 词：Cu-Fe-P铜合金 轧辊辊径 应变速率 显微凹坑 电镀 

分 类 号：TG339[金属学及工艺—金属压力加工]