Development of an Integrated CMUTs-Based Resonant Biosensor for Label-Free Detection of DNA with Improved Selectivity by Ethylene-Glycol Alkanethiols  

集成乙二醇烷硫醇的CMUT共振生物传感器用于提升DNA无标记检测选择性

作　　者：Zhikang Li Yihe Zhao Gian Luca Barbruni Jie Li Zixuan Li Jiawei Yuan Ping Yang Libo Zhao Zhuangde Jiang Sandro Carrara 

机构地区：[1]State Key Laboratory for Manufacturing Systems Engineering,the International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi’an Jiaotong University,Xi’an 710049,China [2]Xi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System,Yantai 264003,China [3]School of Instrument Science and Technology,Xi’an Jiaotong University,Xi’an 710049,China [4]School of Mechanical Engineering,Xi’an Jiaotong University,Xi’an 710049,China [5]Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing,Yantai 265503,China [6]Bio/CMOS Interfaces Laboratory,Institute of Electrical and Microengineering,School of Engineering,École Polytechnique Fédérale de Lausanne,Neuchâtel 2000,Switzerland [7]College of Mechanical and Electrical Engineering,Shaanxi University of Science and Technology,Xi’an 710021,China

出　　处：《Engineering》2024年第10期231-241,共11页工程（英文）

基　　金：supported by the National Key Research and Development Program of China(2022YFB3205400);the National Natural Science Foundation of China(52275570);the Postdoctoral Innovation Talents Support Program(BX20230288);the Postdoctoral Science Foundation of Shaanxi Province(2018BSHEDZZ08).

摘　　要：Gravimetric resonant-inspired biosensors have attracted increasing attention in industrial and point-ofcare applications,enabling label-free detection of biomarkers such as DNA and antibodies.Capacitive micromachined ultrasonic transducers(CMUTs)are promising tools for developing miniaturized highperformance biosensing complementary metal–oxide–silicon(CMOS)platforms.However,their operability is limited by inefficient functionalization,aggregation,crosstalk in the buffer,and the requirement for an external high-voltage(HV)power supply.In this study,we aimed to propose a CMUTs-based resonant biosensor integrated with a CMOS front–end interface coupled with ethylene–glycol alkanethiols to detect single-stranded DNA oligonucleotides with large specificity.The topography of the functionalized surface was characterized by energy-dispersive X-ray microanalysis.Improved selectivity for onchip hybridization was demonstrated by comparing complementary and non-complementary singlestranded DNA oligonucleotides using fluorescence imaging technology.The sensor array was further characterized using a five-element lumped equivalent model.The 4 mm^(2) application-specific integrated circuit chip was designed and developed through 0.18 lm HV bipolar-CMOS-double diffused metal–oxide–silicon(DMOS)technology(BCD)to generate on-chip 20 V HV boosting and to track feedback frequency under a standard 1.8 V supply,with a total power consumption of 3.8 mW in a continuous mode.The measured results indicated a detection sensitivity of 7.943×10^(-3) lmol·L^(-1)·Hz^(-1) over a concentration range of 1 to 100 lmol·L^(-1).In conclusion,the label-free biosensing of DNA under dry conditions was successfully demonstrated using a microfabricated CMUT array with a 2 MHz frequency on CMOS electronics with an internal HV supplier.Moreover,ethylene–glycol alkanethiols successfully deposited self-assembled monolayers on aluminum electrodes,which has never been attempted thus far on CMUTs,to enhance the selectivity of bio-functionalizat

关 键 词：Capacitive micromachined ultrasonic transducers(CMUTs) DNA detection Self-assembled monolayer(SAM) Ethylene-glycol alkanethiols Application-specific integrated circuit(ASIC) 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置] R318[自动化与计算机技术—控制科学与工程]