用于薄液膜厚度测量的面阵列电导传感器的设计与验证  

Design and Validation of Surface Array Conductivity Sensors for Thin Liquid Film Thickness Measurement

作　　者：魏欢 胡珀[1] WEI Huan;HU Po(School of Nuclear Science and Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学核科学与工程学院,上海200240

出　　处：《传感技术学报》2024年第10期1667-1673,共7页Chinese Journal of Sensors and Actuators

摘　　要：液膜厚度是研究降液膜展开及发展演化所需的重要参数,目前市面上主流的膜厚探头主要是基于点探测原理、无法满足液膜展开的面厚度测量需求,本研究基于降液膜厚度的范围,自主设计了基于柔性印刷电路板的电导法同轴圆环面阵列传感器。成功制造的传感器在42 mm×57 mm面积上有3×4个同轴圆环探测单元,探头间距为15 mm,实现了0.3 mm~3 mm范围内的液膜厚度测量,测量电阻换算厚度的误差在10%以内,能满足薄液膜的面厚度测量需求。Liquid film thickness is an important parameter to study the development and evolution of falling film,the current mainstream film thickness probe on the market is mainly based on the principle of point detection,and it can not satisfy the needs of surface thick ness measurement in liquid film development.Based on the range of falling film thickness,a conductance coaxial ring array sensor IS in dependently designed based on flexible printed circuit board.The successfully produced sensor has 3×4 coaxial ring detection units in a 42 mm×57 mm array area,the unit spacing is 15 mm,and it achieves liquid film thickness measurement in the range of 0.3 mm~3 mm with the error of measuring resistance conversion thickness within 10%,which can satisfy the needs of the surface thickness measure ment of thin liquid film.

关 键 词：物理量传感器 液膜厚度测量 电导法 探点阵列 柔性印刷电路板 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]