基于双面多级微结构的柔性电容式压力传感器  

Flexible Capacitive Pressure Sensor Based on Double-Sided Multistage Microstructure

作　　者：黄梁松 王硕 张鹏 张坤 杜明超 黄鑫 步晓飞 HUANG Liangsong;WANG Shuo;ZHANG Peng;ZHANG Kun;DU Mingchao;HUANG Xin;BU Xiaofei(College of Electrical Engineering and Automation,Shandong University of Science and Technology,Qingdao Shandong 266590,China)

机构地区：[1]山东科技大学电气与自动化工程学院,山东青岛266590

出　　处：《传感技术学报》2024年第10期1692-1699,共8页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金重大研究计划项目(91848206)。

摘　　要：柔性压力传感器作为可穿戴智能设备的重要组成部分,在人体行为监测、电子皮肤系统等方面有广泛的应用。为了进一步利用微结构对柔性传感器灵敏度的提升效果,采用聚二甲基硅氧烷(PDMS)与碳黑(CB)、多壁碳纳米管(MWCNTs)混合成导电材料并复制砂纸表面微结构作为上下电极层,用PDMS复制弧形凸起和砂纸微结构组成双面微结构介电层,设计成基于双面多级微结构的柔性电容式压力传感器。两种微结构的组合使得传感器的性能有了明显的提高,具有高的灵敏度(1.2875 kPa^(-1),<0.1 kPa),宽的检测范围(可达100 kPa),快的响应时间(80 ms),并保持良好的重复稳定性。结果表明:该传感器能够在人体行为监测以及其他应用方面发挥理想的性能。As an important part of wearable intelligent devices,flexible sensors are widely used in human behavior monitoring,electronic skin system and so on.In order to further utilize the effect of microstructure on improving the sensitivity of flexible sensors,polydimethylsi loxane(PDMS),carbon black(CB)and multi-wall carbon nanotubes(MWCNTs)are mixed into conductive materials,and the microstructure on the surface of sandpaper is copied as the upper and lower electrode layers of the sensor.PDMS is used to duplicate the curved bulge and sandpaper microstructure to form a double-sided microstructure dielectric layer,so as to design a flexible capacitive pres sure sensor with double-sided multistage microstructure.The combination of the two microstructures significantly improves the performance of the sensor,with high sensitivity(1.2875 kPa^(-1),<0.1 kPa),wide detection range(up to 100 kPa),fast response time(80 ms)and good repeatability stability.The results show that the sensor can play an ideal role in human behavior monitoring and other applications.

关 键 词：电容式压力传感器 双面微结构 多级微结构 人体行为监测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]