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作 者:黄翱翔 殷先印 闫旭 高锡平 饶文秀 HUANG Aoxiang;YIN Xianyin;YAN Xu;GAO Xiping;RAO Wenxiu(China Building Materials Academy,Beijing 100024,China;Shanxi Applied Physics and Chemistry Research Institute,Xi’an 710061,China)
机构地区:[1]中国建筑材料科学研究总院有限公司,北京100024 [2]陕西应用物理化学研究所,西安710061
出 处:《玻璃搪瓷与眼镜》2024年第10期7-12,共6页Glass Enamel & Ophthalmic Optics
摘 要:铂薄膜是薄膜铂电阻温度传感器的重要组成部分,因其机械强度不高,目前主要采取表面制成一层包封玻璃保护铂薄膜。BaO-Al_(2)O_(3)-SiO_(2)(BAS)系微晶玻璃具有化学稳定性好、机械强度高、高温性质较稳定等优点,有望将其引入薄膜铂电阻封装领域。本工作分别采用Li_(2)O、ZrO_(2)、TiO_(2)和Y_(2)O_(3)作为BAS系微晶玻璃的成核剂,研究成核剂种类和含量对微晶玻璃析晶的影响。结果表明:对玻璃析晶行为起到促进作用的强弱排序为:Li_(2)O>TiO_(2)>Y_(2)O_(3)>ZrO_(2)。Li_(2)O可显著促进BAS系玻璃析晶,随着Li_(2)O含量的增加,首先析出正交硅钡石相,接着出现六方钡长石相,最后析出单斜硅钡石相;且当Li_(2)O的摩尔分数为1.5%~2.5%时,BAS系玻璃膨胀系数为(7.75~8.13)×10^(-6)/℃,能与铂电阻基底氧化铝陶瓷膨胀系数(7.6×10^(-6)/℃)相匹配。最后,揭示了BAS系微晶玻璃的析晶机理:玻璃中Li_(2)O起到“积聚”作用,夺取玻璃网络结构中的O^(2-),破坏玻璃结构,降低结构的致密程度,从而降低玻璃化转变温度以及玻璃黏度,加快SiO_(2)的迁移,促进玻璃析晶。Platinum film is an important part of thin-film platinum resistance temperature sensors.Due to its low mechanical strength,the formation of a layer of encapsulated glass on its surface is currently the main means of protecting the platinum film.BaO-Al_(2)O_(3)-SiO_(2)(BAS)system glass-ceramics is expected to be introduced into the field of thin-film platinum resistor encapsulation due to its advantages of good chemical stability,high mechanical strength,and high-temperature stability.The addition of nucleating agents to the glass components can promote the crystallization of the glass,and the nucleating agents have an important influence on the crystallization of the glass.Therefore,Li_(2)O,ZrO_(2),TiO_(2)and Y_(2)O_(3)were used as nucleating agents for BAS microcrystalline glass,and the effects of the types and contents of nucleating agents on the crystallization of microcrystalline glass were investigated.Research showed that the order of the strength of the promoting effect on glass crystallization behavior was Li_(2)O>TiO_(2)>Y_(2)O_(3)>ZrO_(2).Li_(2)O significantly promoted the crystallization of the BAS glass,and with the increase of Li_(2)O content,the orthorhombic barium silicate phase was firstly precipitated,and the hexagonal barium feldspar phase appeared next.With the increase of Li_(2)O content,monoclinic barium silicate phase was firstly precipitated,followed by hexagonal barium feldspar phase,and finally barium silica.Secondly,when the Li_(2)O molar fraction was 1.5%~2.5%,the glass expansion coefficient of the BAS system was(7.75~8.13)×10^(-6)/℃,which matched with the platinum resistor substrate alumina ceramics(7.6×10^(-6)/℃).Finally,the crystallization mechanism of BAS glass-ceramics was revealed:the addition of Li_(2)O played the role of"accumulation"in the glass,seizing the O^(2-)in the glass network structure,destroying the glass structure,reducing the degree of structural densification,thus lowering the glass transition temperature and the glass viscosity,accelerating the migration of S
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