大规模太赫兹相控阵技术的瓶颈与进展  

Bottlenecks and Progress of Large-scale Terahertz Phased Array Technology

作　　者：张季聪 戴炳礼 丰益年 牛中乾 王成[1] 张波[2] ZHANG Jicong;DAI Bingli;FENG Yinian;NIU Zhongqian;WANG Cheng;ZHANG Bo(School of Electronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu,611731,CHN;Shenzhen Institute for Advanced Study,University of Electronic Science and Technology of China,Shenzhen,Guangdong,518038,CHN)

机构地区：[1]电子科技大学电子科学与工程学院,成都611731 [2]电子科技大学深圳高等研究院,广东深圳518038

出　　处：《固体电子学研究与进展》2024年第5期401-405,460,F0002,共7页Research & Progress of SSE

基　　金：国家自然科学基金资助项目(62101107,62301126);深圳市重大专项项目(KJZD20231023094659001);深圳市优秀科技创新人才项目(RCJC20221008092806008);中国博士后科学基金项目(2023M730497)。

摘　　要：大规模相控阵系统是太赫兹无线传输技术走向灵活应用的核心与关键之一。本文介绍了大规模太赫兹相控阵技术的发展瓶颈与研究进展,重点介绍了采用瓦片式拼接的方案,将16个CMOS芯片通过金丝键合互联,构成了最大规模64阵元(8×8)的太赫兹相控阵发射机。通过平衡式直流供电网络和“前向辐射+背部散热”的架构实现良好的直流供给和热量处理,保证阵列的工作性能。峰值等效全向辐射功率(Effective isotropic radiation power,EIRP)可达35 dBm,本振信号泄漏抑制度和镜频信号抑制度均大于35 dB,水平和垂直方向均实现±60°的波束覆盖。本文还推出了国际上最远距离52 m的太赫兹相控阵实时无线通信链路,系统传输速率达1.6 Gbit/s。Large-scale phased array systems are one of the core and key factors for the flexible ap⁃plication of terahertz wireless transmission technology.This article introduces the development bottle⁃neck of large-scale terahertz phased array technology and the research progress.The paper focused on introducing the tile-type splicing solution,which interconnected 16 CMOS chips through gold wire bonding to form the largest-scale terahertz phased array transmitter with 64 elements(8×8).Through the balanced direct current power supply network and the"forward radiation+back heat dis⁃sipation"architecture,good direct current supply and heat treatment was achieved to ensure working performance of array.The peak effective isotropic radiation power(EIRP)can reach 35 dBm,the lo⁃cal oscillator signal leakage suppression and the image frequency signal suppression are both greater than 35 dB,and the horizontal and vertical directions achieve±60°beam coverage.This article also introduces the world's longest distance 52 m terahertz phased array real-time wireless communication link,and the system transmission rate can reach 1.6 Gbit/s.

关 键 词：太赫兹 大规模相控阵 CMOS 实时无线通信 低生产成本 散热处理 

分 类 号：TN47[电子电信—微电子学与固体电子学]