石英挠性加速度计摆片特性仿真研究  

Simulation study on characteristics of quartz flexible accelerometer pendulum

作　　者：郝宇超 刘洪[1] 张佳悦 郑怡晨 殷振青 HAO Yuchao;LIU Hong;ZHANG Jiayue;ZHENG Yichen;YIN Zhenqing(Beijing Key Laboratory of High Dynamic Navigation Technology,Beijing Information Science&Technology University,Beijing 100101,China)

机构地区：[1]北京信息科技大学高动态导航技术北京市重点实验室,北京100101

出　　处：《传感器与微系统》2024年第11期25-27,32,共4页Transducer and Microsystem Technologies

摘　　要：通过优化挠性梁的结构厚度来探究结构变化对石英挠性加速度计的摆性、固有频率、谐响应和过载特性的影响,利用有限元Ansys分析软件进行仿真,得出摆片关键约束因素挠性梁厚度在0.03 mm时,摆片灵敏度最高,一阶固有频率也就是工作频率为23.076 Hz,挠性梁端部最大形变为0.75398 mm,最大应力为23.978 MPa。该研究为后续的适用于重力梯度测量的超高灵敏度石英挠性加速度计的研究与优化改进奠定基础。The influence of structural changes on the pendulum,natural frequency,harmonic response and overload characteristics of quartz flexible accelerometer is explored by optimizing the structural thickness of the flexible beam.The finite element Ansys analysis software is used for simulation.It is concluded that when the thickness of the flexible beam,the key constraint factor of the pendulum,is 0.03 mm,the pendulum sensitivity is the highest.The firstorder natural frequency,namely the working frequency,is 23.076 Hz,and the maximum deformation of the end of the flexible beam is 0.75398 mm,the maximum stress is 23.978 MPa.This research lays a foundation for the subsequent research and optimization of ultrahigh sensitivity quartz flexible accelerometer suitable for gravity gradient measurement.

关 键 词：石英挠性加速度计 石英摆片 有限元仿真 固有频率 重力梯度测量 

分 类 号：TN96[电子电信—信号与信息处理]