STEM朗奇图和电子束斑模拟插件  

STEM Ronchigram and electron probe simulation plug⁃in

作　　者：朱倩[1] 曲先林 王毅[1,2] ZHU Qian;QU Xianlin;WANG Yi(Center for Microscopy and Analysis,Nanjing University of Aeronautics and Astronautics,Nanjing Jiangsu 211016;State Key Laboratory of Mechanics and Control for Aerospace Structures,Nanjing University of Aeronautics and Astronautics,Nanjing Jiangsu 211106,China)

机构地区：[1]南京航空航天大学,分析测试中心,江苏南京211016 [2]南京航空航天大学,航空航天结构力学及控制全国重点实验室,江苏南京211016

出　　处：《电子显微学报》2024年第4期473-478,共6页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金优秀青年科学基金项目(海外);江苏省杰出青年基金(No.BK20231532);中央高校基本科研业务费项目(No.NE2023005);科工局稳定支持国防特色学科基础研究项目(No.ILF23010-2A23).

摘　　要：在扫描透射电子显微镜(STEM)中,实现原子级分辨率的关键在于精确的像差校正,这通常依赖于朗奇图的测量和优化。对于STEM的新手而言,理解和优化朗奇图是一项极具挑战性的任务,往往需要长时间的实践积累才能掌握。本研究介绍了一种朗奇图及电子束斑模拟分析插件,用户可直接调整各种像差参数(包括像散、球差、慧差等),实时观察这些参数变化如何影响朗奇图,从而更直观地理解各种像差对朗奇图和电子束斑的影响。此外,插件还提供focus wobble功能,动态显示不同焦距下的朗奇图和电子束斑,模拟实际实验过程中在正焦附近循环调焦时的朗奇图和电子束斑。该插件不仅为初学者理解像差方程提供了直观图像演示,进而更加便捷和迅速地掌握球差校正电镜的调节和使用,也为研究人员提供了一种展示像差方程、朗奇图和电子束斑的图形化工具。In the scanning transmission electron microscope(STEM),achieving atomic resolution relies on accurate aberration correction,which typically depends on the measurement and optimization of the Ronchigram.For new microscopists,understanding and optimizing the Ronchigram can be a challenging task that often requires extensive practice and experience.In this study,we introduced a Ronchigram and electron probe simulation analysis plug⁃in.This tool allowed users to directly adjust various aberration parameters,such as astigmatism,spherical aberration,coma,and observe their real⁃time effects on the Ronchigram.This interactive approach provided an intuitive understanding of how different aberrations influence the Ronchigram and electron probe.Moreover,the plug⁃in featured a focus wobble feature,dynamically presenting Ronchigram and electron probe images at various focal points.This function simulated the cyclic focusing process near the focal point,replicating conditions encountered in real experiments.This plug⁃in served a dual purpose:it helped novices visualize and comprehend the aberration equations,facilitating a swifter mastery of aberration⁃corrected electron microscopy techniques,while also providing researchers with a graphical interface to represent the relationships between aberration equations,Ronchigrams,and electron probes.

关 键 词：朗奇图 电子束斑 像差校正 图像模拟 

分 类 号：TG115.215.3[金属学及工艺—物理冶金] TP391.9[金属学及工艺—金属学] TN16[自动化与计算机技术—计算机应用技术]