ε-Fe_(2)O_(3)/FeO界面结构与相变机理研究  

Study of the ε-Fe_(2)O_(3)/FeO interfacial structure and phase transformation mechanism

作　　者：陈珊珊 靳千千 熊婷 田敏 姚婷婷 江亦潇 陈春林[1,2] 马秀良[5,6] 叶恒强 CHEN Shanshan;JIN Qianqian;XIONG Ting;TIAN Min;YAO Tingting;JIANG Yixiao;CHEN Chunlin;MA Xiuliang;YE Hengqiang(Shenyang National Laboratory for Materials Science,Institute of Metal Research,Chinese Academy of Sciences,Shenyang Liaoning 110016;School of Material Science and Engineering,University of Science and Technology of China,Shenyang Liaoning 110016;Center for the Structure of Advanced Matter,School of Electronic Engineering,Guangxi University of Science and Technology,Liuzhou Guangxi 545006;Ji Hua Laboratory,Foshan Guangdong 528200;Bay Area Center for Electron Microscopy,Songshan Lake Materials Laboratory,Dongguan Guangdong 523808;Institute of Physics,Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]中国科学院金属研究所沈阳材料科学国家研究中心,辽宁沈阳110016 [2]中国科学技术大学材料科学与工程学院,辽宁沈阳110016 [3]广西科技大学电子工程学院先进物质结构研究中心,广西柳州545006 [4]季华实验室,广东佛山528200 [5]松山湖材料实验室大湾区显微科学与技术研究中心,广东东莞523808 [6]中国科学院物理研究所,北京100190

出　　处：《电子显微学报》2024年第5期525-531,共7页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(Nos.52125101,51971224);广东省基础研究重大项目(No.2021B0301030003);季华实验室项目(No.X210141TL210).

摘　　要：本文利用脉冲激光沉积技术在SrTiO_(3)(111)衬底上生长了ε-Fe_(2)O_(3)薄膜,并应用高分辨X射线衍射(HRXRD)、X射线光电子能谱(XPS)和透射电子显微镜(TEM)对薄膜的显微结构进行了系统表征。XRD和XPS的研究结果表明ε-Fe_(2)O_(3)(001)薄膜在SrTiO_(3)(111)衬底上外延生长,薄膜中Fe离子为+3价。TEM的结果表明,在TEM样品制备过程中,由于高能Ar离子束轰击,ε-Fe_(2)O_(3)/SrTiO_(3)界面上容易发生相变形成FeO。ε-Fe_(2)O_(3)/FeO/SrTiO_(3)的外延关系为ε-Fe_(2)O_(3)(001)[110]//FeO(111)[112]//SrTiO_(3)(111)[112]。基于ε-Fe_(2)O_(3)/FeO界面结构与取向关系,分析了离子束辐照诱导ε-Fe_(2)O_(3)→FeO相变的微观机制。In this study,ε-Fe_(2)O_(3) thin films were grown on SrTiO_(3)(111)substrates using pulsed laser deposition.The microstructure ofε-Fe_(2)O_(3) thin films was systematically investigated through high⁃resolution X⁃ray diffraction,X⁃ray photoelectron spectroscopy and transmission electron microscopy.The XRD and XPS result confirmed that high⁃purityε-Fe_(2)O_(3)(001) thin films were epitaxially grown on the SrTiO_(3)(111) substrates,with Fe ions in the+3 valence state.TEM characterization revealed that the phase transformation fromε-Fe_(2)O_(3) to FeO readily occurred at theε-Fe_(2)O_(3)/SrTiO_(3) interface,likely due to high⁃energy Ar beam irradiation during sample preparation.The epitaxial orientation relationship amongε-Fe_(2)O_(3),FeO and SrTiO_(3) was identified as Fe_(2)O_(3)(001)[110]//FeO(111)[112]//SrTiO_(3)(111)[112].Based on the result of the interfacial structure and orientation relationship,the mechanism of theε-Fe_(2)O_(3)→FeO phase transformation was discussed.

关 键 词：ε-Fe_(2)O_(3) ε-Fe_(2)O_(3)/FeO异质界面 显微结构 相变机制 脉冲激光沉积 

分 类 号：O484.1[理学—固体物理] O771[理学—物理] TB383[一般工业技术—材料科学与工程] TG115.215.3[金属学及工艺—物理冶金] O76[金属学及工艺—金属学] O722