Metasurface-integrated elliptically polarized laserpumped SERF magnetometers  

作　　者：Zihua Liang Jinsheng Hu Peng Zhou Lu Liu Gen Hu Ankang Wang Mao Ye 

机构地区：[1]School of Instrumentation and Optoelectronic Engineering,Beihang University,Beijing 100191,China [2]Institute of Large-scale Scientific Facility and Centre for Zero Magnetic Field Science,Beihang University,Beijing 100191,China [3]Hangzhou Institute of Extremely-Weak Magnetic Field Major National Science and Technology Infrastructure,Hangzhou,Beihang Hangzhou Innovation Institute,Hangzhou 310051,China

出　　处：《Microsystems & Nanoengineering》2024年第4期239-248,共10页微系统与纳米工程（英文）

基　　金：supported by the National Science Fund for Outstanding Young Scholars(37127701);the National Natural Science Foundation of China(77051001);the Innovation Program for Quantum Science and Technology(0300503).

摘　　要：The emergence of biomagnetism imaging has led to the development of ultrasensitive and compact spin-exchange relaxation-free(SERF)atomic magnetometers that promise high-resolution magnetocardiography(MCG)and magnetoencephalography(MEG).However,conventional optical components are not compatible with nanofabrication processes that enable the integration of atomic magnetometers on chips,especially for elliptically polarized laserpumped SERF magnetometers with bulky optical systems.In this study,an elliptical-polarization pumping beam(at 795 nm)is achieved through a single-piece metasurface,which results in an SERF magnetometer with a high sensitivity reaching 10.61 fT/Hz1/2 by utilizing a 87Rb vapor cell with a 3mm inner diameter.To achieve the optimum theoretical polarization,our design combines a computer-assisted optimization algorithm with an emerging metasurface design process.The metasurface is fabricated with 550 nm thick silicon-rich silicon nitride on a 2×2 cm^(2)SiO_(2)substrate and features a 22.17°ellipticity angle(a deviation from the target polarization of less than 2%)and more than 80%transmittance.This study provides a feasible approach for on-chip polarization control of future allintegrated atomic magnetometers,which will further pave the way for high-resolution biomagnetism imaging and portable atomic sensing applications.

关 键 词：process. MAGNETOMETER POLARIZED 

分 类 号：O436.3[机械工程—光学工程] O43[理学—光学]