An ultrathin,rapidly fabricated,flexible giant magnetoresistive electronic skin  

作　　者：Junjie Zhang Zhenhu Jin Guangyuan Chen Jiamin Chen 

机构地区：[1]State Key Laboratory of Transducer Technology,Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100190,China [2]School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China [3]College of Materials Sciences and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Microsystems & Nanoengineering》2024年第4期305-312,共8页微系统与纳米工程（英文）

基　　金：supported in part by the National Key R&D Program of China(2021YFB2011600);the National Natural Science Foundation of China(Grant no.62271469,62201547);the Science and Disruptive Technology Program,the AIRCAS,Young Elite Scientists Sponsorship Program by CAST(No.YESS20210341);the One Hundred Person Project of the Chinese Academy of Sciences,and the Xiaomi Young Talents Program.

摘　　要：In recent years,there has been a significant increase in the prevalence of electronic wearables,among which flexible magnetoelectronic skin has emerged as a key component.This technology is part of the rapidly progressing field of flexible wearable electronics,which has facilitated a new human perceptual development known as the magnetic sense.However,the magnetoelectronic skin is limited due to its low sensitivity and substantial field limitations as a wearable electronic device for sensing minor magnetic fields.Additionally,achieving efficient and non-destructive delamination in flexible magnetic sensors remains a significant challenge,hindering their development.In this study,we demonstrate a novel magnetoelectronic touchless interactive device that utilizes a flexible giant magnetoresistive sensor array.The flexible magnetic sensor array was developed through an electrochemical delamination process,and the resultant ultra-thin flexible electronic system possessed both ultra-thin and non-destructive characteristics.The flexible magnetic sensor is capable of achieving a bending angle of up to 90 degrees,maintaining its performance integrity even after multiple repetitive bending cycles.Our study also provides demonstrations of non-contact interaction and pressure sensing.This research is anticipated to significantly contribute to the advancement of highperformance flexible magnetic sensors and catalyze the development of more sophisticated magnetic electronic skins.

关 键 词：ELECTRONIC MAGNETO utilize 

分 类 号：TN40[电子电信—微电子学与固体电子学]