Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performance  

作　　者：Yan Wang Tunan Lv Junning Zhang Hongbin Yu 

机构地区：[1]School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China [2]Optics Valley Laboratory,Wuhan,Hubei 430074,China [3]Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China

出　　处：《Microsystems & Nanoengineering》2024年第4期329-341,共13页微系统与纳米工程（英文）

基　　金：supported by the National Natural Science Foundation of China(NSFC)(12174137);the National Key Research and Development Plan of China(2020YFB2008800);the Innovation Project of Optics Valley Laboratory(Grant No.OVL2023ZD003).

摘　　要：To address the serious acoustic performance deterioration induced by air leakage in the low-frequency range and the asynchronous vibration in electroacoustic transduction structures near the resonant frequency,a novel sealing strategy is proposed that targets one of the most widely reported piezoelectric MEMS speaker designs.This design consists of multiple cantilever beams,in which the air gaps between cantilevers are automatically and selectively filled with liquid polydimethylsiloxane(PDMS)via the capillary effect,followed by curing.In the proof-of-concept demonstration,the sound pressure level(SPL)within the frequency range lower than 100 Hz markedly increased after sealing in an experiment using an IEC ear simulator.Specifically,the SPL is increased by 4.9 dB at 20 Hz for a 40 Vpp driving voltage.Moreover,the deteriorated SPL response near the resonant frequencies of the cantilever beams(18 kHz–19 kHz)caused by their asynchronous vibration induced by the fabrication process nonuniformity also significantly improved,which successfully increased the SPL to approximately 17.5 dB.Moreover,sealed devices feature nearly the same SPL response as the initial counterpart in the frequency band from 100 Hz to 16 kHz and a total harmonic distortion(THD)of 0.728%at 1 kHz for a 40 Vpp driving voltage.Compared with existing sealing methods,the current approach offers easy operation,low damage risk,excellent repeatability/reliability and excellent robustness advantages and provides a promising technical solution for MEMS acoustic devices.

关 键 词：SEALING PIEZOELECTRIC effect 

分 类 号：TN64[电子电信—电路与系统]