Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption  

作　　者：Young Jae Park Man Jae Her Youngjae Jeong Dong Ju Choi Dong Uk Kim Min Gi Lim Myung Seok Hong Hyug Su Kwon Kyoungsik Yu Sangyoon Han 

机构地区：[1]Department of Robotics and Mechatronics Engineering,Daegu Gyeongbuk Institute of Science and Technology(DGIST),Daegu 42988,Republic of Korea [2]School of Electrical Engineering,Korea Advanced Institute of Science and Technology(KAIST),Daejeon 34141,Republic of Korea [3]Agency for Defense Development,Daejeon,Republic of Korea

出　　处：《Microsystems & Nanoengineering》2024年第4期355-365,共11页微系统与纳米工程（英文）

基　　金：supported by the Agency For Defense Development Grant Funded by the Korean Government(UI210008TD).

摘　　要：The Fabry-Pérot interferometer,a fundamental component in optoelectronic systems,offers interesting applications such as sensors,lasers,and filters.In this work,we show a tunable Fabry-Pérot cavity consisting of tunable Sagnac loop reflectors(SLRs)and phase shifters based on electrostatic microelectromechanical(MEMS)actuator.The fabrication process of the device is compatible with the standard wafer-level silicon photonics fabrication processes.This electrostatic actuation mechanism provides well-balanced,scalable pathways for efficient tuning methodologies.The extinction ratio of the continuously tunable SLRs’reflectivity is larger than 20 dB.Full 2πphase shifting is achieved,and response times of all the components are less than 25μs.Both actuators have extremely low static power,measuring under 20 fW and the energy needed for tuning is both below 20 pJ.

关 键 词：TUNABLE tuning INTERFEROMETER 

分 类 号：TN60[电子电信—电路与系统]