基于碳纳米管-金属肖特基接触的气体低压传感技术  

Low Pressure Gas Sensing Techniques Based on Carbon Nanotube-metal Schottky Contacts

作　　者：黄春田 叶妮妮 邵和助 方朝龙[1] 董长昆[1] HUANG Chuntian;YE Nini;SHAO Hezhu;FANG Chaolong;DONG Changkun(Wenzhou Key Lab of Micro-Nano Optoelectronic Devices,Wenzhou University,Wenzhou 325035,Zhejiang,China)

机构地区：[1]温州大学温州市微纳光电器件重点实验室,浙江温州325035

出　　处：《真空与低温》2024年第6期623-628,共6页Vacuum and Cryogenics

基　　金：国家自然科学基金(62374118);国家重点研发计划(2023YFF0723700)。

摘　　要：碳纳米管(CNT)具有独特的结构和优异的物理性能,在气体吸附的条件下,CNT-金属接触结构的电学性能会发生变化,这种变化可用于气体传感领域。采用Lift-off工艺和介电电泳沉积法(DEP)制备了基于CNT-金属肖特基结的CNT场效应管(CNT-FET)和CNT/Au电阻传感器,并在10−7~10−5 Pa的低压力环境下进行了氢气和氮气传感测试。CNT-FET和CNT/Au电阻传感器对氢气具有相似的传感效应,在测试压力区间内电流分别增长0.05μA和0.14μA。研制成果探索了低压气体传感的新途径。Carbon nanotube(CNT)has unique structure and excellent physical property.It can be used potentially in gas sensing due to gas adsorptions in CNT-metal contact.The CNT-FET and CNT/Au resistance sensors based on the CNTmetal Schottky junction were constructed by the lift-off and dielectrophoretic(DEP)processes.The sensing performances of two devices were tested for hydrogen and nitrogen gases in low pressure range of 10−7~10−5 Pa.The currents of CNT-FET and CNT/Au resistance sensors increased 0.05μA and 0.14μA,respectively,which exhibit similar hydrogen sensing performance.The research results have explored a new approach of low pressure sensing.

关 键 词：碳纳米管 肖特基势垒 气体传感 功函数 

分 类 号：TB71[一般工业技术—真空技术]