光学元件脉冲离子束超精密智能修形策略(封面文章·特邀)  

Ultra-precision intelligent modification strategy of pulsed ion beam for optical components(cover paper·invited)

作　　者：谢凌波 石峰[1,2] 田野 巩保启 乔冬阳 孙国燕 郭双鹏[1,2] 周港 XIE Lingbo;SHI Feng;TIAN Ye;GONG Baoqi;QIAO Dongyang;SUN Guoyan;GUO Shuangpeng;ZHOU Gang(College of Intelligence Science and Technology,National University of Defense Technology,Changsha 410003,China;Laboratory of Science and Technology on Integrated Logistics Support,College of Intelligence Science and Technology,National University of Defense Technology,Changsha 410003,China;Xi’an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi’an 710119,China)

机构地区：[1]国防科技大学智能科学学院,湖南长沙410003 [2]国防科技大学智能科学学院装备综合保障技术重点实验室,湖南长沙410003 [3]中国科学院西安光学精密机械研究所,陕西西安710119

出　　处：《红外与激光工程》2024年第10期40-54,共15页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(52105495,62175259,52105493);中国科学院战略重点研究计划项目(XDA25020317);湖南省科技创新计划项目(2024JJ6460);陕西省自然科学基础研究计划项目(2023-JC-QN-0713);湖南省自然科学基金项目(2023JJ40670);中国科学院青年创新促进会项目(2023423)。

摘　　要：IBF在实现纳米精度的材料去除时,对加工环境及机床精度要求很严格。提出了一种新的脉冲离子束(Pulse Ion Beam,PIB)加工方式,解放了机床的动态性能对加工的影响,避免了连续束流带来的额外去除层。首先对PIB的实现原理进行了说明,验证了其良好的加工性能及出色的材料去除分辨率。其次针对新工艺,仿真分析了PIB加工的优势区间,制定了基于误差分布梯度的加工策略,并利用蚁群算法进行了加工轨迹优化,减少了57.7%的无效路径。最后利用PIB以及新的加工策略,在90 mm的有效口径内实现了0.552 nm精度的光学表面获取,验证了新加工系统和策略的可行性。该研究扩展了离子束作为一种超精密加工方法的应用场景,可以将其作为需要大面积去除微量材料的首选方法。Objective With the ongoing advancement of optical systems,there has been a growing demand in recent years for precision optical components across various cutting-edge research fields,including EUV lithography lenses,synchrotron radiation X-ray mirrors,and strapdown inertial navigation laser gyro resonators.Ion Beam Polishing(IBP)technology is characterized by its ability to remove complex shapes with excellent stability,absence of edge effects,non-contact non-destructive processing,and high precision.It is commonly employed as the final finishing process for high-precision optical components.While there exist various optimization schemes for the current ion beam shaping machining paths and their velocity distributions,there are still instances where the machine tool's dynamic performance cannot meet the requirements of the optimized machining schemes when processing components with large gradient errors.We introduce a novel Pulsed Ion Beam(PIB)machining technique to overcome the limitations associated with current ion beams in the processing of high-precision optical components.This method not only offers ultra-high removal resolution but also significantly reduces the demands on machine tool dynamics,prevents the formation of extra removal layers,and adeptly achieves precise dwell times at each machining point on the component.Methods This article proposes a new PIB processing method,which adjusts the frequency of the pulse power supply to adjust the period of PIB,and controls the duty cycle to control the duration of the pulse beam current in a single period.It can achieve accurate and controllable material removal in the area that does not require processing by turning off the ion beam current in the non-processing area(Fig.1).Intelligent planning of machining paths using ant colony algorithm(Fig.9).Using ZYGO interferometer to measure the final processing results.Results and Discussions The stability and linearity of PIB have been confirmed(Fig.2),with its removal resolution demonstrated to achieve material r

关 键 词：光学加工 脉冲离子束 智能修形策略 超精密加工 

分 类 号：TH161.12[机械工程—机械制造及自动化]