基于GBK标量散射模型的超光滑光学元件表面特性参数预测方法  

Prediction method of surface characteristics parameters of ultra-smooth optical components based on GBK scalar scattering model

作　　者：刘春江 张耘豪 钟哲强[1] 张彬[1] LIU Chunjiang;ZHANG Yunhao;ZHONG Zheqiang;ZHANG Bin(College of Electronics Information Engineering,Sichuan University,Chengdu 610065,China)

机构地区：[1]四川大学电子信息学院,四川成都610065

出　　处：《红外与激光工程》2024年第10期152-160,共9页Infrared and Laser Engineering

基　　金：国家重点研究与发展计划项目(2021YFC2202203)。

摘　　要：在引力波探测系统中,要实现对引力波的高精度测量,超光滑光学元件散射特性至关重要。然而,现有光学元件表面特性参数测量方法难以满足超光滑光学元件的测量需求。针对这一难题,提出了一种基于GBK(Generalized Beckmann-Kirchhoff)标量散射模型的光学元件表面特性参数预测方法。利用GBK标量散射模型和基于光腔衰荡技术的表面散射测量方法,建立了表征超光滑光学元件表面特性参数(表面粗糙度和自相关长度)的方程组,进而利用图解法求解得到超光滑光学元件的表面特性参数。为了验证预测方法的适应性,对不同表面特性参数下的多种待测光学元件进行了预测,获得了不同表面特性参数下元件表面粗糙度和自相关长度预测值的相对误差曲线。结果表明:表面粗糙度在0.1064~1.064 nm范围内时,其预测值相对误差均在1%以内;自相关长度在1064~3192 nm范围内时,其预测值相对误差均在1%以内。因此,在文中提出的表面特性参数范围内,该预测方法能快速准确预测超光滑光学元件的表面特性参数,具有较好的适应性和有效性,可为引力波探测系统中超光滑光学元件散射特性的测量提供参考。Objective The space-based gravitational wave detection system utilizes laser transmission among three satellites for interferometric measurements to detect gravitational waves.This necessitates the space-borne telescope to have transmitting and receiving functions.However,when the space-borne telescope emits laser beams,inevitable backward scattering occurs due to the surface roughness of its ultra-smooth optical components(surface roughness less than 1 nm),which cannot be perfectly smooth.This backward scattering unavoidably decreases the detection accuracy of the signal light.Consequently,the level of backward stray light from the space-borne telescope needs to be below 10−10 to meet the requirements of gravitational wave detection.This presents significant challenges in measuring and suppressing the scattering characteristics of ultra-smooth optical components.In traditional non-contact surface roughness measurements of optical components,methods such as white light scattering and laser reflection interference are used to determine the surface profile of optical elements,followed by surface roughness calculations.However,these methods involve complex setups and high costs.For relatively smooth optical component surfaces,existing techniques such as Total Integrated Scattering(TIS)method and Angle-Resolved Scattering(ARS)Method based on optical scattering principles,exhibit low measurement accuracy.Therefore,existing methods for measuring surface characteristics parameters of optical components are inadequate to meet the measurement requirements of ultra-smooth optical components.There is a pressing need to develop prediction methods suitable for the surface characteristics parameters of ultra-smooth optical components to meet the high-precision requirements of gravitational wave detection systems.Method In response to the measurement requirements of ultra-smooth optical components,the method for measuring the surface scatter rate of highly reflective optical elements based on dual-channel optical cavity decay

关 键 词：引力波探测 超光滑光学元件 GBK标量散射模型 表面粗糙度 自相关长度 

分 类 号：TN247[电子电信—物理电子学]