基于扩展标量衍射理论的多层衍射元件基底材料选择方法  

Substrate material selection method for multilayer diffraction elements based on extended scalar diffraction theory

作　　者：梁宗林 张博[1] 赵渊明 朴明旭[1] 董奕洋 张悦玲 佟首峰[1] LIANG Zonglin;ZHANG Bo;ZHAO Yuanming;PIAO Mingxu;DONG Yiyang;ZHANG Yueling;TONG Shoufeng(Changchun University of Science and Technology The School of Electro-Optical Engineering,Changchun 130022,China;The 27th Research Institute of China Electronics Technology Group Corporation,Zhengzhou 450047,China;The 53th Research Institute of China Electronics Technology Group Corporation,Tianjin 300308,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]中国电子科技集团公司第二十七研究所,河南郑州450047 [3]中国电子科技集团第五十三研究所电磁空间安全全国重点实验室,天津300308

出　　处：《红外与激光工程》2024年第10期235-243,共9页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(62105041,62305032);吉林省科技厅项目(YDZ202301ZYTS405);重庆市自然科学基金项目(CSTB2022NSCQ-MSX1483);吉林省人力资源和社会保障厅博士后择优资助项目;吉林省人力资源和社会保障厅创新创业人才工程项目。

摘　　要：基于扩展标量衍射理论(Extended Scalar Diffraction Theory,ESDT),建立了衍射光学元件(Diffractive Optical Element,DOE)的有效微结构高度、有效周期宽度、入射角度、基底材料与衍射效率之间的理论关系模型。提出了斜入射时,利用基于ESDT的DOE基底材料选择方法。以工作在MWIR-LWIR双波段的多层衍射光学元件(Multilayer Diffractive Optical Element,MLDOE)为例进行分析。结果表明:积分衍射效率(Polychromatic Integral Diffraction Efficiency,PIDE)不仅与MLDOE的微结构高度相关,同时受周期宽度、入射角及基底材料等因素的影响。对于基底材料组合AMTIR1-ZNS,在所有周期宽度下均能获得最小的衍射效率差值,而对于基底材料组合GE-ZNS,在所有周期宽度下均能获得最大的衍射效率差值。对比分析MWIR-LWIR双波段下ZNSE-ZNS和AMTIR1-ZNS两组基底材料组合PIDE>90%的角度范围,当周期宽度为500μm时,ZNSE-ZNS的入射角度范围为4.5°,而AMTIR1-ZNS的入射角度范围为5.4°,然而,随着周期宽度的增加,ZNSEZNS的入射角度范围反超了AMTIR1-ZNS。该设计方法和结论可以用于指导双波段红外光学系统中MLDOE的设计。Objective The diffractive optical element(DOE)possesses unique characteristics,such as negative dispersion and athermalization,which distinguish it from traditional refractive lenses.DOE is extensively utilized in various applications,including imaging,beam shaping,and 3D displays.It plays a significant role in the miniaturization of imaging optical systems and their engineering applications.Previous studies utilizing vector analysis and the extended scalar diffraction theory(ESDT)have demonstrated a more accurate calculation of the shading effect's impact on the reduction of diffraction efficiency at normal incidence.However,these studies did not address the influence of substrate materials at large-angle incidence on diffraction efficiency.This paper presents a technique for selecting substrate materials for the DOE based on ESDT.This method is essential for advancing the theoretical examination of the multilayer diffractive optical element(MLDOE)at high incident angles,particularly in the design of refractive-diffractive hybrid systems that incorporate diffraction elements with small period widths.Methods Based on the ESDT,a theoretical model was proposed to describe the relationship between the microstructure height and the period width of the DOE,taking into account the substrate material and the angle of incidence(Eq.6).A method for selecting the substrate material for the DOE,based on the ESDT at oblique incidence,was proposed(Eq.8).An analysis was conducted using a MLDOE operating in the MWIR-LWIR dual band as an illustrative example.Results and Discussions As illustrated in Fig.3,there is a significant contrast between the outcomes of SDT and ESDT.The results of SDT remain unaffected by the width of the microstructure period,whereas the outcomes of ESDT fluctuate based on this width.Figure 4 demonstrates the variation in polychromatic integral diffraction efficiency(PIDE)of ESDT with respect to angle under different period widths.It is evident from Fig.4 that,according to ESDT,there are discrepancies in

关 键 词：衍射光学元件 标量衍射理论 矢量衍射理论 扩展标量衍射理论 基底材料选择 

分 类 号：TN29[电子电信—物理电子学] O436[机械工程—光学工程]