基于液体光阑的微流控可变光衰减器阵列  

Liquid stop based microfluidic variable optical attenuator array

作　　者：万静[1] 俞廷杰 陈建松 周瑞 万洪丹[1] WAN Jing;YU Ting-Jie;CHEN Jian-Song;ZHOU Rui;WAN Hong-Dan(School of Electronic and Optical Engineering,School of Flexible Electronics(Future Technology),Nanjing University of Posts and Telecommunications,Nanjing 210023,China)

机构地区：[1]南京邮电大学电子与光学工程学院,柔性电子(未来技术)学院,江苏南京210023

出　　处：《红外与毫米波学报》2024年第5期609-614,共6页Journal of Infrared and Millimeter Waves

基　　金：中国国家自然科学基金(12174199);万静自然学科横向科研发展基金(HJ1060319960015)。

摘　　要：可变光衰减器(Variable optical attenuator,VOA)广泛应用于光通信和光电子系统中,然而很少有VOA阵列的报道。本文提出一种基于液体光阑的微流控VOA阵列,利用螺旋形轨道实现多光束能量同步非等量衰减,或者使用环形轨道同步等量衰减,其中液体光阑的通光孔径通过介质上电润湿效应调节。该VOA阵列结构紧凑、体积小、操作简单、成本低,可灵活调整多光束之间的衰减比以实现多信道功率均衡。研究结果表明:所提微流控VOA阵列具有超越一般VOA阵列的宽衰减范围(0-100%衰减)和很小的插入损耗(0.26 dB),响应时间为0.1 ms,对偏振不敏感。它也能兼作光开关阵列。所提VOA阵列展示了集成和高性能的潜力,并为应用提供一种经济有效的方式。Variable optical attenuator(VOA)arrays can be widely applied in optical communication and optoelectronic systems,but few VOA arrays are reported.Here a liquid-stop based microfluidic VOA array is proposed.It uses a spi-ral orbit to achieve different degrees of synchronous energy attenuation of multiple beams,or uses an annular orbit to achieve a same degree of synchronous energy attenuations,where the clear aperture of liquid stop is regulated by the electrowetting-on-dielectric effect.It has a compact structure,small volume,simple operation and low cost.Mean-while,the attenuation ratio of beams can be flexibly adjusted to achieve the power equalization.The research results in-dicate that the VOA array has a wide attenuation range(0-100%attenuation)and very small insertion loss(0.26 dB)over general VOA arrays.The response time is 0.1 ms,and it is insensitive to the polarization.It can also act as an opti-cal switch array.The proposed VOA array demonstrates the potential of integration and high performance,and it can provide a cost-effective way for applications.

关 键 词：微流控光学 可变光衰减器阵列 液体光阑 介质上电润湿 

分 类 号：O439[机械工程—光学工程]