面向OCT应用的氮化硅波导基超宽带片上光源  

Study of Silicon Nitride waveguide-based ultra-wideband on-chip light source for OCT applications

作　　者：惠战强 李佳颖 李田甜 韩冬冬 巩稼民 HUI Zhan-Qiang;LI Jia-Ying;LI Tian-Tian;HAN Dong-Dong;GONG Jia-Min(Xi'an Key Laboratory of Microwave Photonics and Optical Communication,Xi’an University of Posts and Telecommunications,Xi’an,710121,China;School of Electronic Engineering,Xi’an University of Posts and Telecommunications,Xi’an,710121,China)

机构地区：[1]西安市微波光子与光通信重点实验室,陕西西安710121 [2]西安邮电大学,电子工程学院,陕西西安710121

出　　处：《红外与毫米波学报》2024年第5期671-683,共13页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(61875165);陕西省重点研发计划项目(2022GY-008);陕西省自然科学基础研究计划项目(2022JQ-638);陕西省创新能力支撑计划项目(2022PT-15);陕西省教育厅协同创新项目(20JY060)。

摘　　要：光学相干层析成像(Optical Coherence Tomography,OCT)技术具有非侵入、高分辨率、可实时成像等优点,在生物医学、材料学及红外传感等众多领域被广泛应用。设计了一种基于氮化硅(Si3N4)的脊形悬空光波导,基于时域有限差分法对所设计波导的主要结构参数进行了优化,并研究了该波导中产生的超连续谱特性。数值模拟结果表明,在脊宽=750 nm、脊高=700 nm、平板厚度=200 nm以及上覆层高=150 nm的优化结构下,当入射泵浦光波长为1.3µm,峰值功率为2 kW,和脉宽为50 fs时,基于该光波导可以产生波长覆盖可见光至中红外(703~4014 nm)的宽带超连续谱。这一结果对于促进片上集成宽带光源在生物医学等领域的应用具有重要作用。Optical coherence tomography(OCT)technology has the advantages of non-invasive,high-resolution,and real-time imaging,which is widely used in various fields such as biomedicine,material science and infrared sensing.A ridge suspended optical waveguide based on silicon nitride(Si3N4)is proposed.The structural parameters of the de-signed waveguide were optimized by using finite difference time domain(FDTD)method.The characteristics of the su-percontinuum spectrum generated in the optimized waveguide were investigated The simulation results show that for the optimized optical waveguide structure with ridge width of 750 nm,ridge height of 700nm,plate thickness of 200 nm,and upper layer height of 150 nm,when a pump light with wavelength of 1.3μm,peak power of 2 kW and pulse width of 50 fs was injected into the waveguide,a broadband supercontinuum spectrum with wavelength covering the visible to the mid-infrared region(703~4014 nm)can be generated.This work plays an important role in promoting the applica-tion of on-chip integrated broadband light source in biomedical imaging and related fields.

关 键 词：光学相干层析成像 超连续谱 氮化硅波导 色散工程 非线性效应 

分 类 号：TN252[电子电信—物理电子学]