采用菱形辐条的高对称MEMS蜘蛛网状盘式谐振陀螺仪  

High-Symmetry MEMS Cobweb-Like Disk Resonator Gyroscope with Rhomboid Spokes

作　　者：许杨 王琮琛 杨军营 陈建霖 王诗男 Xu Yang;Wang Congchen;Yang Junying;Chen Jianlin;Wang Shinan(School of Microelectronics,Shanghai University,Shanghai 201800,China;State Key Laboratory of Transducer Technology,Shanghai 200050,China;Shanghai Integrated Circuit Materials Research Institute,Shanghai 201899,China)

机构地区：[1]上海大学微电子学院,上海201800 [2]传感技术国家重点实验室,上海200050 [3]上海集成电路材料研究院,上海201899

出　　处：《微纳电子技术》2024年第11期91-97,共7页Micronanoelectronic Technology

摘　　要：微电子机械系统(MEMS)陀螺仪因抵抗制造误差能力差和品质因数低等问题限制了其在高端领域的应用。通过对MEMS陀螺仪的理论分析和有限元仿真,基于绝缘体上硅(SOI)工艺设计并制备出了一种由多个同心嵌套的蜘蛛网环和菱形辐条组成的新型MEMS盘式谐振陀螺仪。实验结果表明,该陀螺仪的驱动谐振频率为42.749 kHz,感应谐振频率为42.798 kHz,频率失配为1.145×10^(-3),实测谐振频率与仿真结果差异为8.5%,优于采用相同工艺制作的环形盘式谐振陀螺仪。该MEMS陀螺仪不仅性能优异、工艺流程简单,而且由于采用全线性结构,所以对制造误差也相对不敏感,适合批量生产,具有较高的产业价值。Micro-electromechanical system(MEMS)gyroscopes are limited in high-end applications due to their poor resistance to manufacturing errors and low quality factors.Based on the theoretical analysis and finite element simulation of MEMS gyroscope,a new type of MEMS disk resonator gyroscope consisting of multiple concentrically cobweb-like rings and rhomboid spokes was designed and fabricated based on silicon-on-insulator(SOI)technology.The experimental results show that the drive resonance frequency of the gyroscope is 42.749 kHz,the sense resonance frequency is 42.798 kHz,and the frequency split is 1.145×10^(-3).The difference between the measured resonance frequency and simulation result is 8.5%, which is better thanthe ring-like disk resonator gyroscope made by the same process. The MEMS gyroscope hasexcellent performance and simple process flow, and is relatively insensitive to manufacturingerrors due to its all-linear structure, which is suitable for mass production and has high industrialvalue.

关 键 词：微电子机械系统(MEMS) 陀螺仪 绝缘衬底上硅(SOI) 蜘蛛网环 菱形辐条 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TH703[机械工程—仪器科学与技术]