表面等离子渗氮对TiAlN涂层TiCN基金属陶瓷性能的影响  

The Influence of Surface Plasma Nitriding on the Properties of TiAlN Coated TiCN-Based Cermet

作　　者：陈诚 贠庆芳[3] 郭凯 向志杨 熊计 刘俊波[1,2] 赵剑峰 CHEN Cheng;YUN Qing-fang;GUO Kai;XIANG Zhi-yang;XIONG Ji;LIU Jun-bo;ZHAO Jian-feng(School of Mechanical Engineering,Sichuan University,Chengdu 610065,China;Yibin Industrial Technology Research Institute,Sichuan University,Yibin 644000,China;Dongfang Turbine Co.,Ltd.,Deyang 618000,China)

机构地区：[1]四川大学机械工程学院,四川成都610065 [2]四川大学宜宾产业技术研究院,四川宜宾644000 [3]东方汽轮机有限公司,四川德阳618000

出　　处：《稀有金属与硬质合金》2024年第5期68-75,102,共9页Rare Metals and Cemented Carbides

基　　金：四川省科技计划项目(23ZHCG0049,2023YFG0078,23ZHCG0030);东方电气集团-四川大学联合创新研究院项目(23H0632);四川大学-宜宾政府战略合作支持项目(2020CDYB-15);德阳市揭榜挂帅项目(2022JBZG006)。

摘　　要：针对TiCN基金属陶瓷,调节不同N_(2)/Ar流量比对其进行等离子渗氮,并在渗氮样品表面沉积TiAlN涂层。采用GIXRD、EDS、SEM、HR-TEM、划痕测试、纳米压痕测试和光学图像测试仪等研究了渗氮过程N_(2)/Ar流量比对涂层组织结构、膜基界面状态、力学性能和涂层金属陶瓷刀片切削性能的影响。结果表明,随着N_(2)/Ar流量比的提高,TiAlN涂层晶粒逐渐细化,涂层厚度不断降低,基体表面仍有黏结相残留,进而影响表面涂层的生长和性能。当N_(2)/Ar流量比为1时,膜基界面处存在硬质相生长区和富黏结相生长区两种涂层生长区域,涂层在硬质相表面为共格外延生长,富黏结相区域存在原子排列紊乱的过渡区,涂层为半共格外延生长;涂层(200)晶面取向最强,织构系数为1.91;涂层硬模比(H/E)最高,为0.094。当N_(2)/Ar流量比为2时,TiAlN涂层的硬度和弹性模量均最高,分别为34.15GPa和416.64GPa。在切削加工过程中,切削接触区域主要发生磨粒磨损和粘着磨损。当N_(2)/Ar流量比为1时,涂层TiCN基金属陶瓷刀片切削性能最佳。Plasma nitriding were carried out on TiCN-based cermet by varying N_(2)/Ar flow ratio,and TiAlN coating was deposited on the surface of the nitrided sample.GIXRD,EDS,SEM,HR-TEM,scratch test,nano indentation test and optical image tester were applied to study the influence of N_(2)/Ar flow ratio du-ring nitriding process on the microstructure,status of coating-substrate interface,mechanical properties of the coating and cutting performance of the coated cermet blades.The results show that with the increase of the N_(2)/Ar flow ratio,TiAlN coating grains gradually refine,the thickness of the coating decreases,and part of binder phase remains on the surface of the substrate,which affects the growth and properties of the coa-ting.When the N_(2)/Ar flow ratio is 1,there are two kinds of coating growth areas at the coating-substrate interface:hard phase growth area and binder-rich phase growth area.The coating grows coherently on the surface of the hard phase.There is a transition zone with disordered atomic arrangement in the binder-rich phase area,and the coating grows semi-coherently.Besides,the coating is dominated by crystal plane(200)orientation with a texture coefficient of 1.91,and the H/E ratio reaches the highest of 0.094.When the N_(2)/Ar flow ratio is 2,the hardness and elastic modulus of the TiAlN coating are the highest,which are 34.15 GPa and 416.64 GPa,respectively.During cutting,abrasive wear and adhesive wear mainly occur in the cutting contact area.The coated TiCN-based cermet blades exhibit the best cutting performance when the N_(2)/Ar flow ratio is 1.

关 键 词：TiCN基金属陶瓷 等离子渗氮 TIALN涂层 膜基界面 力学性能 切削性能 

分 类 号：TG148[一般工业技术—材料科学与工程]