六氟丙烯生产及除杂的研究进展  

Research Progress on Production and Impurity Removal of Hexafluoropropylene

作　　者：杨佳林 付豪 何红振 袁胜芳 张金彪 YANG Jialin;FU Hao;HE Hongzhen;YUAN Shengfang;ZHANG Jinbiao(Haohua Gas Co.,Ltd.,Luoyang 471000,China)

机构地区：[1]昊华气体有限公司,河南洛阳471000

出　　处：《低温与特气》2024年第5期6-10,14,共6页Low Temperature and Specialty Gases

基　　金：集成电路用新型刻蚀气体电子级氟甲烷的研制(2301005A)。

摘　　要：六氟丙烯是一种重要的有机氟化物中间体,广泛应用于医药、农药等行业,高纯度的六氟丙烯可用于半导体行业。从六氟丙烯上游产品四氟丙烯和下游产品六氟环氧丙烷和全氟聚醚等产品出发,综述了六氟丙烯的工业生产方法及其下游产品的应用,并对高纯六氟丙烯制备过程中除杂、除酸及脱除其他氟碳化合物的方法进行了总结与比较,最后提出了六氟丙烯产业未来发展的新趋势。Hexafluoropropene is an important organic fluoride intermediate,which is widely used in medicine,pesticide and other industries.High purity hexafluoropropylene can be used in semiconductor industry.The industrial production methods and applications of hexafluoropropylene are summarized from the upstream products of hexafluoropropylene,the downstream products of hexafluoropropylene oxide and perfluoropolyether,and the methods of removing impurities,acids and other fluorocarbons in the preparation of high purity hexafluoropropylene are summarized and compared.Finally,the new development trend of hexafluoropropylene industry in the future is put forward.

关 键 词：六氟丙烯 下游产品 生产合成 精馏 

分 类 号：TQ117[化学工程—无机化工]