超短激光微加工数学建模优化分析  

Optimization analysis of mathematical modeling for ultra short laser microfabrication

作　　者：施培成 张钦 SHI Pei-cheng;ZHANG Qin(Zhegnzhou University of Industrial Technology,Zhengzhou 451150,China)

机构地区：[1]郑州工业应用技术学院,河南郑州451150

出　　处：《激光与红外》2024年第10期1554-1561,共8页Laser & Infrared

基　　金：2021年河南省科技攻关计划项目(No.212102210372)资助。

摘　　要：超短激光微加工进行优化时涉及到多个参数,而这些参数间往往存在着复杂的相互关系,导致优化方法的优化性能较差。为此,提出超短激光微加工数学建模优化分析方法。首先,基于导热微分方程分析超短激光微加工在表面产生的热累积作用,根据分析结果构建超短激光微加工的数学模型;然后,通过数学模型,分析不同抛光参数对加工过程中的热效应和热应力的影响程度;最后,采用递阶结构对硬化层的分布平均性、表面层深与硬度等目标进行优化,以此构建超短激光微加工数学优化模型,实现优化分析。实验结果表明:运用该模型后平均加工精度高达99%,粗糙度最低时仅为5%,光洁度与均匀性均达到了90%以上,具有较好的实用性。Ultrashort laser micromachining for optimization involves a number of parameters,and there are often complex relationships between these parameters,resulting in poor optimization performance of the optimization method.For this reason,a mathematical modeling and optimization analysis method for ultrashort laser micromachining is proposed.First of all,the thermal accumulation effect of ultrashort laser micromachining on the surface is analyzed based on the dfferential equation of heat conduction,and the mathematical model of ultrashort laser micromachining is constructed according to the analysis results.Then,through the mathematical model,the influence of different polishing parameters on the thermal effect and thermal stress in the processing process is analyzed.Finally,the hierarchical structure is adopted to optimize the distribution uniformity,surface layer depth and hardness of the hardened layer,so as to build the mathematical optimization model of ultrashort laser micromachining and achieve the optimization analysis.The experimental results show that the average machining accuracy is as high as 99%,the lowest roughness is only 5%,and the finish and uniformity are more than 90%,which is of good practicability.

关 键 词：超短激光微加工 导热微分方程 数学建模优化 表面粗糙度 加工精度 

分 类 号：TN249[电子电信—物理电子学] TG665[金属学及工艺—金属切削加工及机床]