高功率半导体激光叠阵光纤耦合系统与光束整形设计  

Fiber Coupling System and Beam Shaping Design for High-Power Semiconductor Laser Stack

作　　者：李奎奎 张伟桥 董风鑫 张建心 周旭彦[2,3] Li Kuikui;Zhang Weiqiao;Dong Fengxin;Zhang Jianxin;Zhou Xuyan(School of Physics and Physical Engineering,Qufu Normal University,Qufu 273165,Shandong,China;Weifang Academy of Advanced Opto-Electronic Circuits,Weifang 261071,Shandong,China;Key Laboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,ChineseAcademy of Sciences,Beijing 100083,China;School of Physics and Electronic Information,Weifang University,Weifang 261061,Shandong,China)

机构地区：[1]曲阜师范大学物理工程学院,山东曲阜273165 [2]潍坊先进光电芯片研究院,山东潍坊261071 [3]中国科学院半导体研究所固态光电信息技术重点实验室,北京100083 [4]潍坊学院物理与电子信息学院,山东潍坊261061

出　　处：《中国激光》2024年第17期90-95,共6页Chinese Journal of Lasers

基　　金：山东省重点研发计划(2023ZLYS03,2022CXGC020104);广东省重点领域研发计划(2020B090922003)。

摘　　要：针对半导体激光器叠阵整体光束质量较差,以及光束整形元件较为复杂的问题,提出了一种“切割-压缩-旋转-重排”的新型半导体激光器叠阵光束整形方案,并基于该光束整形方案设计了一种阶梯旋转重排棱镜。相比于传统的光束整形方法,该方案只需要使用数个相同的阶梯旋转重排棱镜就能实现光束整形,极大简化了光束整形的流程,缩小了整体光纤耦合系统的体积。仿真结果表明,该阶梯旋转重排棱镜可将由8个巴条组成的半导体激光器叠阵耦合进数值孔径为0.22、芯径为200μm的光纤,输出功率为455.4 W,光纤耦合效率为94.9%。系统的整体尺寸为20 mm×60 mm×15 mm,结构紧凑,可用于固体激光泵浦等。Objective The quest for high efficiency,compactness,and lightweight design in fiber-coupled laser diode modules is becoming increasingly prominent,particularly within the solid-state laser domain and other fields where high integration or portability is demanded.Given the considerations of cost and the complexities involved in mounting and tuning,laser diode stacks emerge as the preferred sources for high-power fiber-coupled laser diodes.Nonetheless,the pronounced disparity in beam quality across the fast and slow axes presents challenges in accomplishing efficient coupling.To bridge this quality gap,it is imperative to tailor the beam profile of the laser diode stack accordingly.Currently,geometric beam shaping is considered as the prevalent technique for modifying the output of laser diode stacks,enabling beam manipulation without altering the inherent output traits of the laser.This method primarily involves the cutting and reconfiguration of beams through the use of parallel plates or similar optical elements.However,this conventional approach leans on an extensive array of prisms,leading to cumbersome systems.A significant drawback is that optical components are limited to singular functions,lacking in integration.Thus,devising a cohesive beam-shaping strategy is vital for the advancement of integrated fiber-coupled laser diode systems.Methods To address the issues concerning the poor beam quality of the laser diode stack and the complexity of beam shaping elements,we propose a new cut-compression-rotation-rearrangement beam shaping method for the laser diode stack and design a stepped rotation rearrangement prism.First,to realize an efficient collimation effect,we collimate the beam by using fast and slow axis collimation lenses with effective focal lengths of 0.3 mm and 8 mm,respectively,resulting in a parallel beam.Subsequently,the designed stepped rotation rearrangement prism is utilized for cutting the beam in the direction of the slow axis in a staggered arrangement.The rotational rearrangement of the

关 键 词：半导体激光器 光束整形 光束质量 光纤耦合 

分 类 号：TN248.4[电子电信—物理电子学]