高功率高光束质量全固态内腔三倍频355nm激光器  

High⁃Power,High⁃Beam⁃Quality,All⁃Solid⁃State Intracavity Frequency Tripling 355 nm Laser

作　　者：刘鑫宇 张艳林 曹雪辰 杨婕 苏静[1,2] 卢华东 Liu Xinyu;Zhang YanLin;Cao Xuechen;Yang Jie;Su Jing;Lu Huadong(State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Opto-Electronics,Shanxi University,Taiyuan 030006,Shanxi,China;Collaborative Innovation Center for Extreme Optics,Shanxi University,Taiyuan 030006,Shanxi,China)

机构地区：[1]山西大学光电研究所量子光学与光量子器件国家重点实验室,山西太原030006 [2]山西大学极端光学协同创新中心,山西太原030006

出　　处：《中国激光》2024年第17期130-136,共7页Chinese Journal of Lasers

基　　金：国家自然科学基金(61975100,62105192);国家重点研发计划(2022YFC2204003);山西省杰出青年培育项目(202103021221004);山西省留学基金委资助研究项目(2022-015);山西省科技创新人才计划(202204051002005);山西省专利转化专项计划(202305007);山西省1331工程项目;第一实验室-国创中心(山西)科技创新项目。

摘　　要：通过设计优化二倍频晶体的参数,较好地补偿了基频光与倍频光在三倍频晶体中混频时产生的走离效应。通过设计优化谐振腔参数,增大了三倍频晶体处基频光束的光斑半径,使穿过三倍频晶体的基频光束接近平行,从而减小了三倍频晶体处基频光束的发散角,进一步提高了三倍频转换效率。当泵浦注入功率为96.8 W,脉冲重复频率为35 kHz时,355 nm紫外激光的平均输出功率最高为14.1 W,10 h的功率稳定性(均方根)优于0.9%,光束质量因子优于1.18。整个系统具有结构简单、平均功率高、功率稳定性高、光束质量好等优点,适合进行产品化开发。Objective High-power,high-beam-quality,all-solid-state 355 nm ultraviolet lasers,with their short wavelengths,easy focusability,and high energy characteristics,are being widely applied in precision machining,biomedical,optical manufacturing,and optical sensing fields.The most common technique by which to achieve 355 nm ultraviolet output is the use of a master oscillator power amplifier(MOPA)to amplify 1064 nm seed light through single or multiple stages.This is followed by triple-frequency conversion outside the cavity.However,the overall complexity of the system is not conducive to the design of high-stability ultraviolet lasers.Compared to external frequency tripling technology,the intracavity frequency tripling process can fully utilize the high power density inside the cavity for nonlinear mixing,thereby improving the conversion efficiency,and its compact overall structure and high stability make it an effective means by which to realize the widespread application of high-power all-solid-state 355 nm ultraviolet lasers.To further improve the output power of the 355 nm ultraviolet laser achieved by intracavity frequency conversion technology and to reduce the beam quality factor to a value below 1.2,this study first examines the impact of walk-off on the output power of 355 nm lasers under the same and different optical axis orientations of two nonlinear crystals.Then,walk-off compensation technology between nonlinear crystals is used to effectively compensate for the walk-off phenomenon caused by the mixing of fundamental frequency light and harmonic light in the triple-frequency crystal,thereby increasing the output power of the 355 nm laser to 14.1 W.Methods To obtain a high-power,high-beam-quality,all-solid-state 355 nm ultraviolet laser,a solid-state intracavity Nd∶YVO4 laser is first designed and manufactured to significantly enlarge the spot radius of the fundamental frequency light at the tripling crystal while ensuring high power output,thereby extending the lifespan of the nonlinear crystal.Then,t

关 键 词：355 nm紫外激光器 腔内三倍频 走离补偿 高功率 全固态 

分 类 号：TN248[电子电信—物理电子学]