基于650 nm单角度面增益芯片的波长调谐干涉光源  

Wavelength Tunable Interferometric Light Source Based on 650 nm Single Angled Facet Gain Chip

作　　者：杨振营 杨顺帆 葛佳妮 韩志刚 刘琦 苏建 张晓东 何勇[1,2] 朱日宏 Yang Zhenying;Yang Shunfan;Ge Jiani;Han Zhigang;Liu Qi;Su Jian;Zhang Xiaodong;He Yong;Zhu Rihong(School of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,Jiangsu,China;MIIT Key Laboratory of Advanced Solid Laser,Nanjing University of Science and Technology,Nanjing 210094,Jiangsu,China;Shandong Huaguang Optoelectronics Co.,Ltd.,Jinan 250100,Shandong,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]南京理工大学先进固体激光工信部重点实验室,江苏南京210094 [3]山东华光光电子股份有限公司,山东济南250100

出　　处：《中国激光》2024年第17期188-197,共10页Chinese Journal of Lasers

基　　金：国家自然科学基金(61875087)。

摘　　要：提出一种基于650 nm单角度面增益芯片的波长调谐干涉光源。基于外腔激光器的腔增益模型,研究了增益芯片输出端反馈强度、增益带宽等核心参数对激光器稳定性和调谐特性的影响,明确了可调谐干涉光源对增益芯片的基本要求。在国内现有650 nm法布里-珀罗(FP)激光器外延技术的基础上,通过设计和生长芯片的量子阱和单角度面波导结构,并优化芯片的制程,成功制备了增益带宽为8 nm、功率为5.5 mW的650 nm低内腔反馈增益芯片。利用该芯片研制了功率大于7 mW、无跳模调谐范围大于100 pm、分辨率达到10 fm的波长调谐干涉光源,该光源已成功应用于600 mm口径波长调谐干涉仪。多次干涉测量结果的标准差小于0.0001λ,表明该光源能够满足大口径高精度波长调谐干涉仪的使用需求。Objective A laser interferometer is the standard instrument for measuring the surface distributions and wave aberrations of different optical systems.As one of the most significant modules,the interferometric light source is used in conjunction with a beam expender,reference mirror,and imaging module to form stable and high contrast interferograms.The wide application of large-aperture optical devices has promoted the development of a large-aperture interferometer,and the wavelength tunable laser is the most popular light source for large-aperture interferometers.The high-power wavelength tunable interferometric light source with wide mode-hop-free(MHF)range requires a high-performance red gain chip.Domestic enterprises have made great progress in 650 nm semiconductor lasers.The wavelength tunable interferometric light source based on a 650 nm gain chip is crucial for the independent and controllable development of precision optical measurement equipment such as large-aperture interferometers.Methods We propose a wavelength tunable interferometric light source based on a 650 nm single angled facet(SAF)gain chip.The effects of the feedback strength at the output end and gain bandwidth of the gain chip on the laser stability and tuning characteristics are investigated based on the gain model of the external cavity laser.The influence of the waveguide tilt angle on the reflectivity of the chip output end is calculated.Relying on the mature technology,the 650 nm gain chip is rapidly verified.The Littman-type wavelength tunable laser is developed with this gain chip,and the main parameters,including the tuning range and resolution,are tested.We build a large-aperture interferometer consisting of the wavelength tunable interference light source,a Fizeau interferometer host,and a beam expansion system.The zero-order waveplates are used in the large-aperture interferometer to suppress the uneven contrast of the interferogram induced by the retardation differences at different wavelengths.Multiple interferometry measureme

关 键 词：仪器 计量 干涉光源 干涉测量 增益芯片 波长调谐激光器 

分 类 号：O436[机械工程—光学工程]