光场调制技术在超快激光加工中的应用(特邀)  

Application of Light Field Modulation Technology in Ultrafast Laser Processing(Invited)

作　　者：柴源[1] 闫跃潇 方红华 孙洪波[1,2] Chai Yuan;Yan Yuexiao;Fang Honghua;Sun Hongbo(Department of Precision Instrument,State Key Lab of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China;College of Electronic Science&Engineering,State Key Lab of Integrated Optoelectronics,Jilin University,Changchun 130012,Jilin,China)

机构地区：[1]清华大学精密仪器系,精密测试技术及仪器国家重点实验室,北京100084 [2]吉林大学电子科学与工程学院,集成光电子学国家重点实验室,吉林长春130012

出　　处：《光学学报》2024年第17期161-182,共22页Acta Optica Sinica

基　　金：国家重点研发计划(2022YFB4600400);国家自然科学基金(62075115,62335013)。

摘　　要：光场调制技术通过改变激光波前振幅、相位、偏振等信息,可以改变焦平面光场分布,实现特种加工。简要介绍了光场调制的原理,以及光场调制技术在无衍射光束加工、多焦点并行加工、图案化光场加工、矢量光场加工和光斑形貌校正等方面的研究进展和应用现状,并对光场调制的问题挑战和未来前景进行展望。Significance Ultrafast laser processing exhibits several key characteristics,including high processing accuracy,broad applicability to various materials,and three-dimensional non-contact processing.It holds significant potential for applications in electronics,medical devices,and scientific research.Traditional laser processing with a single focus achieves sub-wavelength resolution but may not always meet processing requirements due to limitations imposed by the optical system and Gaussian mode field.Light field modulation technology enables the alteration of the light field distribution at the focal plane by modifying the amplitude,phase,polarization,and other aspects of the laser wavefront,thus achieving specialized processing.In this review,we provide an overview of light field modulation principles,research progress,and application status.We cover non-diffractive beam processing,multifocal parallel processing,patterned light field processing,vector light field processing,and spot morphology correction while discussing the associated problems,challenges,and prospects.Process In section 2,we introduce the principles of light field modulation,including modulation processes,propagation methods,and calculation techniques.The modulation processes consist of phase modulation,amplitude modulation,and complex modulation,each with its advantages and disadvantages discussed in subsection 2.1.Subsection 2.2 presents three common propagation paths:objective focus path,spatial diffraction path,and direct projection path,as illustrated in Fig.1.The main diffraction processes differ among these paths,affecting calculation complexity and capacity usage.In subsection 2.3,we discuss several calculation methods for holographic phase and amplitude,including iterative calculation,forward modeling,and deep learning algorithms.We also introduce a closed-loop feedback method proposed to optimize phase,addressing practical issues like optical system aberrations and optical axis alignment errors.Section 3,the core chapter,focuses on re

关 键 词：光场调制 超快激光加工 无衍射光束 图案化光场 矢量光场 光斑形貌校正 

分 类 号：TN249[电子电信—物理电子学]