Large-range displacement measurement in narrow space scenarios:fiber microprobe sensor with subnanometer accuracy  

作　　者：CHEN ZHANG YISI DONG PENGCHENG HU HAIJIN FU HONGXING YANG RUITAO YANG YONGKANG DONG LIMIN ZOU JIUBIN TAN 

机构地区：[1]Center of Ultra-precision Optoelectronic Instrument,Harbin Institute of Technology,Harbin 150080,China [2]Key Laboratory of Ultra-precision Intelligent Instrumentation,Harbin Institute of Technology,Harbin 150080,China [3]Zhengzhou Research Institute,Harbin Institute of Technology,Zhengzhou 450000,China [4]National Key Laboratory of Science and Technology on Tunable Laser,Harbin Institute of Technology,Harbin 150001,China

出　　处：《Photonics Research》2024年第9期1877-1889,共13页光子学研究（英文版）

基　　金：National Key Research and Development Program of China(2022YFF0705802);Natural Science Foundation of Heilongjiang Province(LH2019E048);China Postdoctoral Science Foundation(2023M730883);National Postdoctoral Program for Innovative Talents(BX20230478).

摘　　要：The embedded ultra-precision displacement measurement is of great interest in developing high-end equipment as well as precision metrology.However,conventional interferometers only focus on measurement accuracy neglecting the sensor volume and requirement of embedded measurement,thus hindering their broad applications.Here we present a new sensing method for realizing large-range displacement measurement in narrow space scenarios based on the combination of a fiber microprobe interference-sensing model and precision phase-generated carrier.This is achieved by microprobe tilted-axis Gaussian optical field diffraction and high-order carrier demodulation to realize large-range displacement sensing.It is uncovered that the microprobe element misalignment and phase demodulation means play pivotal roles in the interference signal and the accuracy of large-range displacement sensing.The analysis shows that the proposed interference-sensing method can effectively reduce the nonlinearities.Experimental results illustrate that the measurement range extends from 0 to 700 mm.Furthermore,the maximum nonlinear error is reduced from tens of nanometers to 0.82 nm over the full range,allowing subnanometer accuracy for embedded measurements in the hundreds of millimeters range.

关 键 词：FIBER MILLIMETER INTERFEROMETER 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]