Twenty-milliwatt, high-power, high-efficiency, single-mode, multi-junction vertical-cavity surface-emitting lasers using surface microstructures  

作　　者：YAO XIAO PEI MIAO JUN WANG HENG LIU YUDAN GOU ZHICHENG ZHANG BANGGUO WANG WULING LIU QIJIE WANG GUOLIANG DENG SHOUHUAN ZHOU 

机构地区：[1]College of Electronics and Information Engineering,Sichuan University,Chengdu 610064,China [2]School of Electrical and Electronic Engineering,Nanyang Technological University,Singapore 639798,Singapore [3]Suzhou Everbright Photonics Co.,Ltd.,Suzhou 215163,China

出　　处：《Photonics Research》2024年第9期1899-1906,共8页光子学研究（英文版）

基　　金：China Scholarship Council(No.202106240176).

摘　　要：High-power,high-efficiency single-mode vertical-cavity surface-emitting lasers(VCSELs)are crucial in the realm of green photonics for high-speed optical communication.However,in recent years,the power and efficiency of single-mode VCSELs have remained relatively low and have been progressing slowly.This study combines theoretical models with experiments to show that multi-junction cascaded 940 nm VCSELs based on surface microstructures can achieve high power,high efficiency,and low divergence in single-mode laser output.Simulations show multi-junction VCSELs with surface microstructures can boost mode modulation capabilities,power,and efficiency,potentially allowing high-power single-mode VCSELs to surpass 60%efficiency.Using this technique,the 6μm oxide aperture VCSELs with surface relief of different diameters were fabricated.The singlemode VCSELs with the output power of 20.2 mW,side-mode suppression ratios greater than 35 dB,42%electro-optical efficiency,and a 9.8°divergence angle(at 1=e^(2))under continuous-wave operation were demonstrated.Near-field images verified its fundamental mode operation.To the best of the authors’knowledge,this is the highest single-mode power recorded for a single-unit VCSEL to date,almost twice the currently known record,while still maintaining a very high electro-optical conversion efficiency.This research will provide valuable references for the further development and application of high-power,high-efficiency single-mode semiconductor lasers.

关 键 词：power MODE CAVITY 

分 类 号：TN248[电子电信—物理电子学]