精密旋转轴六自由度误差同时测量方法  

Simultaneous Measurement Method of Six-Degree-of-Freedom Error of Precision Rotating Axis

作　　者：温洪泉 杨文军[1,2] 张子龙 刘振 曾良才 Wen Hongquan;Yang Wenjun;Zhang Zilong;Liu Zhen;Zeng Liangcai(School of Mechanery and Automation,Wuhan University of Science and Technology,Wuhan 430081,Hubei,China;Key Laboratory of Metallurgical Equipment and Control Technology,Ministry of Education,Wuhan University of Science and Technology,Wuhan 430081,Hubei,China)

机构地区：[1]武汉科技大学机械自动化学院,湖北武汉430081 [2]武汉科技大学冶金装备及其控制教育部重点实验室,湖北武汉430081

出　　处：《激光与光电子学进展》2024年第17期213-222,共10页Laser & Optoelectronics Progress

基　　金：国家自然科学基金青年基金(51905200)。

摘　　要：针对现有精密旋转轴运动精度检测技术无法兼顾高精度、高效率、动态连续、误差完整测量等问题,提出一种基于绝对测量的精密旋转轴六自由度误差同时测量方法。使用多波长相移干涉技术对跟随旋转轴运动的微纳结构特征样件进行瞬时绝对位姿测量。建立精密旋转轴六自由度运动误差模型,确定各自由度误差与标准微纳结构特征空间位姿变换之间的映射关系。通过对微纳结构特征空间位姿进行解析,分离出精密旋转轴六自由度误差,实现精密旋转轴六自由度误差同时、连续、高精度测量。对精密气浮旋转台的测量结果表明,测得的角度定位误差为2.98",倾斜误差为0.91",径向误差为399 nm,轴向误差为37 nm。This study proposes a method for simultaneous measurement of six-degree-of-freedom errors in precision rotating axes using absolute measurement.The proposed method addresses the limitations of current precision rotating shaft motion accuracy detection technologies,which are unable to balance high precision,efficiency,dynamic continuity,and comprehensive error measurement.Utilizing multi-wavelength phase-shifting interferometry,the method measures the instantaneous absolute pose of micro/nanostructure characteristic samples aligned with the rotational axis motion.It establishes a six-degree-of-freedom motion error model for precision rotating axes and identifies the mapping relationship between each degree of freedom error and the pose transformation of the standard micro/nanostructure feature space.By analyzing the characteristic spatial pose of micro and nanostructures,the six-degree-of-freedom error of the precision rotation axis is separated,enabling simultaneous,continuous,and high-precision measurements.Experiments conducted on a precision air bearing rotary table revealed an angle positioning error of 2.98",a tilt error of 0.91",a radial error of 399 nm,and an axial error of 37 nm.

关 键 词：精密旋转轴 六自由度误差 同时测量 多波长相移干涉 微纳结构特征样件 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]