基于超高斯函数的球形抛光工具去除函数库建立方法  

Removal Function Library for Spherical Polishing Tools Based on Super-Gaussian Function

作　　者：徐梓榕 黄启泰 任建锋 Xu Zirong;Huang Qitai;Ren Jianfeng(School of Optoelectronic Science and Engineering,Soochow University,Suzhou 215006,Jiangsu,China;Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province,Suzhou 215006,Jiangsu,China)

机构地区：[1]苏州大学光电科学与工程学院,江苏苏州215006 [2]江苏省先进光学制造技术重点实验室,江苏苏州215006

出　　处：《激光与光电子学进展》2024年第17期296-302,共7页Laser & Optoelectronics Progress

摘　　要：去除函数库是大量不同形状的去除函数所形成的集合,去除函数库的建立对数控抛光中去除函数的调用具有重要的作用。以柔性球形抛光工具的去除函数为研究对象,建立以超高斯分布为主体的拟合模型并对数十组数据进行了最小二乘拟合,采用多变量插值方法对拟合参数进行处理,建立了进动角、压力、转速此三种抛光参数任意组合所对应去除函数的数据库。在去除函数库中随机选取了4个样本与实验数据对比,相对误差均小于7%,验证了该方法的有效性。A removal function library is a collection of removal functions with a large number of different shapes,and its establishment plays a crucial role in the invocation of removal functions during computer numerical control polishing.This study focuses on the removal functions of flexible spherical polishing heads,establishing a fitting model based on a superGaussian distribution.The model was applied to a least squares fitting of dozens of datasets.Multivariate interpolation methods were used for handling fitting parameters,leading to the creation of a database of removal functions corresponding to any combination of precession angle,pressure,and rotation speed.Four samples were randomly selected from the removal function library and compared with experimental data.The relative error was less than 7%in all cases,confirming the effectiveness of the method.

关 键 词：柔性抛光工具 去除函数 超高斯分布 最小二乘拟合方法 多变量插值 

分 类 号：O436[机械工程—光学工程]