Fizeau干涉系统虚拟环形光源设计及噪声抑制  

Design of Virtual Ring Light Source and Noise Suppression for Fizeau Interference System

作　　者：王刚 张迪 郝怡蕾 刘丙才 王红军 田爱玲 朱学亮 Wang Gang;Zhang Di;Hao Yilei;Liu Bingcai;Wang Hongjun;Tian Ailing;Zhu Xueliang(Shaanxi Provincial Key Laboratory of Thin Film Technology and Optical Detection,School of OptoElectronic Engineering,Xi’an Technological University,Xi’an 710021,Shaanxi,China)

机构地区：[1]西安工业大学光电工程学院陕西省薄膜技术与光学检测重点实验室,陕西西安710021

出　　处：《激光与光电子学进展》2024年第17期303-307,共5页Laser & Optoelectronics Progress

基　　金：陕西省科技厅项目(2023KXJ-066)。

摘　　要：基于环形光源抑制相干噪声的原理,针对典型Fizeau干涉系统,设计了利用光楔旋转产生的虚拟环形光源,讨论了光楔楔角的选取,仿真了虚拟环形光源Fizeau干涉系统的随机噪声点和相干噪声源,并对比了点光源与环形光源模式干涉条纹图。结果表明,虚拟环形光源能有效地抑制系统噪声,同时能够保持较好的干涉条纹对比度。Based on the principle of coherent noise suppression using a ring light source,a virtual ring light source generated by a rotating optical wedge is designed for a typical Fizeau interference system.The selection of wedge angle for the optical wedge is discussed,the random noise points and coherent noise sources of the virtual ring-light-source Fizeau interference system are simulated,and the interference fringe diagrams of the point source and ring source modes are compared.The results show that the virtual ring light source can suppress the system noise efficiently while maintaining a better contrast of the interference fringes.

关 键 词：干涉测量 相干噪声 环形光源 旋转光楔 

分 类 号：O436.1[机械工程—光学工程]