基于光丝的激光精密加工技术(特邀)  

Precision Processing Technology Based on Laser Filament(Invited)

作　　者：何宏智 柴兆麟 张楠[1] 刘伟伟[1] HE Hongzhi;CHAI Zhaolin;ZHANG Nan;LIU Weiwei(Institute of Modern Optics,College of Electronic Information and Optical Engineering,Nankai University,Tianjin 300350,China)

机构地区：[1]南开大学电子信息与光学工程学院现代光学研究所,天津300350

出　　处：《光子学报》2024年第10期11-21,共11页Acta Photonica Sinica

基　　金：国家自然科学基金(No.12074198);中央高校基本科研基金(No.63243166)。

摘　　要：光丝的高强度和大长宽比特性,使基于光丝的激光精密加工技术在消费电子、芯片制造、通讯和医疗等领域具有重要的应用和广阔的发展前景。对光丝在高深宽比微结构、大幅面曲面微结构、生物材料加工及焊接等方面的应用进行了系统综述。论述了光丝激光加工的原理,列举了光丝激光加工技术的典型应用,并探讨了光丝激光加工技术面临的主要挑战和亟待解决的科学问题,包括跨介质光丝产生与调控以及激发态材料对光丝特性的影响等。与传统激光加工技术相比,光丝激光精密加工技术在保持微米/纳米加工精度的同时,无需精确调焦,即可实现微纳结构的高效制备。With the advancement of science,traditional mechanical processing methods are no longer able to meet the processing needs of humans for various two-dimensional or three-dimensional micro nano structures.Therefore,over the past half century,a series of high-energy beam processing technologies have rapidly developed.For example,electron beam processing,ion beam processing,and beam processing technologies with different wavelengths from extreme ultraviolet to near-infrared.This article discusses the principle of laser filament processing,lists typical applications of laser filament processing technology,and explores the main challenges and urgent scientific problems faced by laser filament processing technology.This article provides a systematic review of the applications of laser filament in high aspect ratio microstructures,large aspect surface microstructures,biomaterial processing,and welding.Including the generation and regulation of cross medium laser filament,as well as the influence of excited state materials on the properties of laser filament.Compared with traditional laser processing technology,laser filament precision processing technology can achieve efficient preparation of micro nano structures without precise focusing while maintaining micro/nano processing accuracy.Femtosecond laser filament processing is a complex physical process involving multiple disciplines such as light,heat,force,and materials.Femtosecond laser filament processing is a complex physical process involving multiple disciplines such as light,heat,force,and materials.Femtosecond laser filament processing involves the generation and regulation of cross dielectric filaments,as well as the influence of excited state materials on filament properties and many other scientific issues that need to be addressed.Solving these fundamental scientific problems is beneficial for accurately predicting and controlling material damage in the laser action area,improving the accuracy and quality of the processed surface,reducing material loss,and a

关 键 词：激光技术 飞秒激光成丝 非线性相互作用 激光制造 微纳制造 

分 类 号：TN249[电子电信—物理电子学]