纳米金刚石基湿度传感器  

A Nanodiamond Based Humidity Sensor

作　　者：张吾优 杨西贵 ZHANG Wu-you;YANG Xi-gui(Henan Key Laboratory of Diamond Materials and Devices,School of Physics,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]郑州大学物理学院河南省金刚石材料与器件重点实验室,河南郑州450001

出　　处：《真空电子技术》2024年第5期54-58,70,共6页Vacuum Electronics

摘　　要：湿度对生产生活具有重要的影响,在工业上需要对废气的湿度进行分析,在农业方面需要控制环境湿度使得植物更好地生长,在气象学上通过湿度值来预测天气,实现对湿度的实时监测具有重要意义。目前,主要是通过湿度传感器来监测湿度。现有的湿度传感器主要由纤维素、聚合物和金属氧化物等材料制成,然而这些传感器很难兼顾灵敏度高,稳定性好等优点。因此,需要寻找一种合适的材料制备出能兼顾这些优良性能的湿度传感器。基于此,制备了纳米金刚石基湿度传感器,该传感器具有高灵敏度(1.1×106%)和良好的稳定性。此外,将该纳米金刚石基湿度传感器应用于呼吸监测,能够对呼吸频率和呼吸流量进行实时分析。Humidity has a significant impact on production and daily life.In industry,it is necessary to analyze the humidity of exhaust gases;in agriculture,it is necessary to control the environmental humidity to promote better plant growth;and in meteorology,the humidity values are used to predict weather.Therefore,it is of great significance to achieve real-time monitoring of humidity.Current humidity monitoring is mainly realized by humidity sensors mainly made of materials such as cellulose,polymers,and metal oxides,which are difficult to have the advantages of high sensitivity and good stability simultaneously.It is necessary to find a suitable material for a humidity sensor that can balance these excellent properties.On this basis,a nanodiamond based humidity sensor is prepared,which has high sensitivity(1.1×106%)and good stability.By applying the nanodiamond based humidity sensor in respiratory monitoring,the respiratory rate and respiratory flow rate can be analyzed in real-time.

关 键 词：纳米金刚石 湿度传感器 灵敏度 稳定性 呼吸监测 

分 类 号：TN386[电子电信—物理电子学] TN305TN605