340 GHz宽带金刚石输能窗的设计优化与试验研究  

Optimal Design and Experimental Study on 340 GHz Broadband Diamond RF Windows

作　　者：张琳[1] 潘攀[1] 李莉莉[1] 高大川 李亚南 马可心 蔡军[1] 冯进军[1] ZHANG Lin;PAN Pan;LI Li-li;GAO Da-chuan;LI Ya-nan;MA Ke-xin;CAI Jun;FENG Jin-jun(National Key Laboratory of Science and Technology on Vacuum Electronics,Beijing Vacuum Electronics Research Institute,Beijing 100015,China)

机构地区：[1]中国电子科技集团公司第十二研究所微波电真空器件国家重点实验室,北京100015

出　　处：《真空电子技术》2024年第5期83-85,92,共4页Vacuum Electronics

摘　　要：针对340 GHz行波管用金刚石输能窗的宽带传输要求,基于多晶金刚石膜和微米晶-超纳米晶金刚石复合膜,开展了金刚石输能窗的优化设计与试验验证研究。研究结果表明,多晶金刚石输能窗在320~363 GHz带宽内S_(11)<-15 dB,S_(21)>-3 dB;微米晶-超纳米晶复合金刚石输能窗在313~385 GHz带宽内S_(11)<-15 dB,S_(21)>-2.5 dB,同比工作带宽增加近2倍,有效拓展了金刚石输能窗的工作带宽。Aiming at the broadband transmission requirements of diamond RF windows for 340 GHz traveling wave tubes,optimal design and experimental studies of diamond RF windows are carried out on the basis of polycrystalline diamond films and microcrystalline/super-nanocrystalline diamond composite films.The results show that,the S_(11)of the polycrystalline diamond RF window is less than-15 dB and the S_(21)is more than-3 dB in 320-363 GHz,and the S_(11)of the microcrystalline/super-nanocrystalline composite diamond RF window is less than-15 dB and the S_(21)is more than-2.5 dB in 313-385 GHz,which indicates the latter is more capable of expanding the bandwidth of traveling wave tubes compared to the former.

关 键 词：340 GHz行波管 输能窗 微米晶-超纳米晶复合金刚石薄膜 带宽 

分 类 号：TN124[电子电信—物理电子学]