集成电路用气动隔膜阀空化特性的数值研究  

Cavitation characteristics of pneumatic diaphragm valves for integrated circuits

作　　者：唐金鑫 陈波[2] 周临震[1] 李培源 Tang Jinxin;Chen Bo;Zhou Linzhen;Li Peiyuan(School of Mechanical Excellence,Yancheng Institute of Technology,Jiangsu Yancheng,224051,China;Institute of Microelectronics of the Chinese Academy of Sciences,Beijing,100029,China)

机构地区：[1]盐城工学院机械工程学院,江苏盐城224051 [2]中国科学院微电子研究所,北京100029

出　　处：《机械设计与制造工程》2024年第11期117-122,共6页Machine Design and Manufacturing Engineering

摘　　要：为了研究自主设计的集成电路用气动隔膜阀的空化特性,基于Fluent软件的多相流模型对全三维流体域进行了数值模拟,分析了入口压力与开度变化对空化强度的影响。采用理论分析与仿真相结合的方法,发现阀座与阀芯底部最易遭受空化的损伤,空化破裂会引起局部的湍流动能强度增大。当开度一定时,空化强度随着入口压力的增加而增大;当入口压力一定时,空化强度随着开度的增加而减小。Aiming at the cavitation characteristics of the self-designed pneumatic diaphragm valve for integrated circuits,the full three-dimensional fluid domain is numerically simulated based on the multiphase flow model of Fluent software,and the effect of inlet pressure and valve openings on the cavitation intensity is investigated.Using a combination of theoretical analysis and simulation,it is found that the valve seat and the bottom of the valve core are most susceptible to cavitation damage,and cavitation rupture causes an increase in the local turbulent kinetic energy intensity.When the degree of opening is certain,the cavitation intensity increases with the increase of the inlet pressure;when the inlet pressure is certain,the cavitation intensity decreases with the increase of the degree of opening.

关 键 词：气动隔膜阀 空化模型 多相流 半导体阀门 数值模拟 

分 类 号：TH137[机械工程—机械制造及自动化]