某企业芯片制造的废水处理工艺设计研究  

Design and Research on Wastewater Treatment of an Chip Semiconductor Factory

作　　者：谢先思 Xie Xiansi(Guangdong New Dayu Environmental Technology Co.,Ltd.,Guangzhou Guangdong 510000,China)

机构地区：[1]广东新大禹环境科技股份有限公司,广东广州510000

出　　处：《山西化工》2024年第10期246-249,共4页Shanxi Chemical Industry

摘　　要：针对某企业芯片制造生产过程产生的氨氮废水、含氟废水、减薄硅片废水以及酸碱废水等进行研究,设计出合理的废水处理工艺,确保废水在处理之后能达到排放标准,为生产车间稳定生产提供有效保障。In this paper,ammonia-nitrogen wastewater,fluoride wastewater,thinning-scratching wastewater,and acid-alkali wastewater from the chipmaking process of an chip semiconductor factory have been researched,and logical wastewater treatment process have been designed,to guarantee wastewater can meet emission standard and provide effective support for stable production in the production workshop.

关 键 词：半导体 氨氮废水 含氟废水 减薄划片废水 酸碱废水 处理工艺 排放标准 

分 类 号：X703.1[环境科学与工程—环境工程]