VO_(2)-SiO_(2)复合薄膜的激光诱导损伤特性研究  

Laser-Induced Damage Characteristics of VO_(2)-SiO_(2)Composite Films

作　　者：韩笋 李艳[1] HAN Sun;LI Yan(School of Materials and Physics,China University of Mining and Technology,Xuzhou 221116,China)

机构地区：[1]中国矿业大学材料与物理学院,徐州221116

出　　处：《人工晶体学报》2024年第10期1738-1744,共7页Journal of Synthetic Crystals

基　　金：中国矿业大学教改项目(2023ZDKT05-210)。

摘　　要：本文采用溶胶-凝胶法制备了VO_(2)和VO_(2)-SiO_(2)复合薄膜,并用X射线衍射仪(XRD)和紫外-可见分光光度计对薄膜的相结构和透过率进行了表征。结果表明,制备的VO_(2)为单斜相(B),VO_(2)-SiO_(2)复合薄膜的XRD图谱和VO_(2)类似,薄膜在450~800 nm的光学透过率达到了90%以上。激光诱导损伤阈值(LIDT)测试结果显示,VO_(2)-SiO_(2)复合薄膜的LIDT为3.9 J/cm^(2),相比VO_(2)薄膜提高了77.3%。通过场发射扫描电子显微镜(FESEM)和台阶仪研究了VO_(2)薄膜和VO_(2)-SiO_(2)复合薄膜的损伤形貌差异,VO_(2)薄膜呈现出熔融型损伤,VO_(2)-SiO_(2)薄膜则呈现出熔融型损伤和应力型损伤的共同特征。此外,构建了不同薄膜的激光诱导损伤模型,揭示了相关损伤特性和内在机制。The VO_(2)and VO_(2)-SiO_(2)composite films were prepared by sol-gel method.The phase structure and transmittance of films were characterized by X-ray diffraction(XRD)and ultraviolet visible spectrophotometer.The results reveal that the prepared VO_(2)film is monoclinic phase(B),and the XRD patterns of VO_(2)-SiO_(2)composite film is similar to that of VO_(2)film.The optical transmittance of films have reached over 90%within the range of 450 nm to 800 nm.The laser induced damage threshold(LIDT)of VO_(2)-SiO_(2)composite film is 3.9 J/cm^(2),which is 77.3%higher than that of VO_(2)film.The difference in damage morphology between VO_(2)film and VO_(2)-SiO_(2)film were studied by FESEM and step analyzer.The VO_(2)film exhibits melt type damage,while the VO_(2)-SiO_(2)film exhibits melt type damage and stress damage.In addition,laser-induced damage models for different films were constructed and damage characteristics and underlying mechanisms were discussed.

关 键 词：VO_(2) SiO_(2) 溶胶-凝胶法 光学透过率 激光诱导损伤阈值 损伤特性 

分 类 号：TB383.2[一般工业技术—材料科学与工程] TN249[电子电信—物理电子学]