低温微磨料气射流加工的硬脆材料耐冲蚀性能对比  

Comparison of erosion resistance of hard and brittle materials processed by lowtemperature micro-abrasive gas jet

作　　者：徐朋冲 孙玉利[1] 张桂冠 康诗杰 卢文壮[1] 孙业斌[1] 左敦稳[1] XU Pengchong;SUN Yuli;ZHANG Guiguan;KANG Shijie;LU Wenzhuang;SUN Yebin;ZUO Dunwen(College of Mechanical&Electrical Engineering,Nanjing University of Aeronautics&Astronautics,Nanjing 210016,China;Institute for Advanced manufacturing,Shandong University of Technology,Zibo 255049,Shandong,China)

机构地区：[1]南京航空航天大学机电学院,南京210016 [2]山东理工大学先进制造研究院,山东淄博255049

出　　处：《金刚石与磨料磨具工程》2024年第5期665-674,共10页Diamond & Abrasives Engineering

基　　金：国家自然科学基金面上项目(52075254)。

摘　　要：低温微磨料气射流加工硬脆材料时,其变脆易被冲蚀去除。对碳化硅(SiC)、氮化硅(Si3N4)、钇稳定氧化锆(YSZ)、99氧化铝(99 Al2O3)、石英玻璃5种硬脆材料进行低温微磨料气射流加工对比实验,探究加工压力、冲击加工角度及加工次数等工艺参数对5种硬脆材料的冲蚀去除率、低温冲蚀槽三维形貌及表面轮廓的影响,优选出低温下耐冲蚀性能良好的硬脆材料。结果表明:随着加工压力和加工次数增加,5种材料的冲蚀去除率都不断增大;随着冲击加工角度变化,5种材料的低温冲蚀槽体积也在变化,并在加工角度为90°的垂直加工角度附近时达到最大;在相同的加工工艺参数下,Si_(3)N_(4)材料的冲蚀去除率最小,其最大低温冲蚀槽深度只有20μm,SiC材料的与其相差不大,YSZ和99 Al_(2)O_(3)的冲蚀去除率依次增大,但石英玻璃材料的冲蚀去除率最大且远大于其他4种材料的。同时,Si3N4的低温冲蚀槽槽形不明显,且其表面较平整,去除量最小,因而耐冲蚀性能最佳。Objectives:During low-temperature micro-abrasive air jet machining,the mechanical properties of materials undergo changes,making the material more prone to brittleness and erosion removal.Comparative experiments were conducted on the low-temperature micro-abrasive air jet machining of hard and brittle materials to investigate their machining performance at low temperatures and to indentify materials with better erosion resistance under such conditions.Methods:Low-temperature micro-abrasive air jet machining comparative experiments were conducted on five materials:silicon carbide(SiC),silicon nitride(Si_(3)N_(4)),yttrium-stabilized zirconia(YSZ),99%alumina(Al_(2)O_(3)),and quartz glass.First,the materials were pretreated using the same surface treatment method,and a material removal model was established to identify the factors affecting the changes in low-temperature properties.Next,micro-abrasive air jet machining experiments were performed at 77 K to investigate the effects of different process parameters−including machining pressure,impact machining angle,and machining time−on erosion removal rates,low-temperature erosion groove three-dimensional morphology,and surface profiles of the five materials.Finally,the three-dimensional morphology of the low-temperature erosion grooves and the surface profiles of the materials were compared and analyzed to evaluate the erosion resistance of each material during low-temperature machining.Results:The processing performance of the five materials at low-temperatures showed the following trends:(1)As the processing pressure increased,the surface groove volumes of all five materials gradually increased.However,the surface groove volumes of Si3N4 and SiC did not increase significantly.(2)As the impact angle increased,the surface groove volumes of all five materials also gradually increased.The groove volume reached its maximum value when the impact angle approached a vertical processing angle.Si3N4 exhibited the smallest low-temperature erosion groove volume under these

关 键 词：硬脆材料 低温 磨料气射流 耐冲蚀性能 冲蚀去除率 

分 类 号：TG73[金属学及工艺—刀具与模具] TG58