真空环境下类富勒烯碳薄膜与不同配副材料的摩擦学性能  

Tribological Behavior of Fullerene-like Carbon Films Against Various Mating Materials in Vacuum Conditions

作　　者：魏晓莉 程志强[2,3] 李春燕 冯钰媛[1] 高凯雄 WEI Xiaoli;CHENG Zhiqiang;LI Chunyan;FENG Yuyuan;GAO Kaixiong(School of Chemical Engineering,Lanzhou University of Arts and Sciences,Lanzhou 730000,China;Key Laboratory of Wear and Protection of Materials,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;State Key Laboratory of Advanced Processing and Recycling of Non-ferrous Metals,Lanzhou University of Technology,Lanzhou 730050,China)

机构地区：[1]兰州文理学院化工学院,兰州730000 [2]中国科学院兰州化学物理研究所兰州润滑材料与技术创新中心,兰州730000 [3]兰州理工大学省部共建有色金属加工与再利用国家重点实验室,兰州730050

出　　处：《表面技术》2024年第21期55-62,共8页Surface Technology

基　　金：甘肃省教育厅青年博士基金项目(2022QB-196);国家重点研发计划项目(2023YFB3712300);甘肃省自然科学基金项目(24JRRA954、22JR5RA095);兰州文理学院校级博士专项计划(2021SZZX07);中国科学院“西部之光”人才计划。

摘　　要：目的提高类富勒烯碳薄膜真空摩擦学性能。方法采用等离子增强化学气相沉积技术(PECVD)制备了类富勒烯碳薄膜(FLC),利用扫描电子显微镜(SEM)、高分辨透射电子显微镜(HRTEM)、拉曼光谱(Raman)和纳米力学仪等研究了薄膜厚度、结构及力学性能。采用真空摩擦试验机考察了真空环境下类富勒烯碳薄膜分别与非晶碳薄膜(DLC)、FLC、钢球和MoS_(2)薄膜组成配副的摩擦学性能,结合磨痕形貌和转移膜Raman及HRTEM结构分析,探究了材料的摩擦磨损机制。结果MoS_(2)与FLC组成的摩擦副具有低摩擦因数(0.02)和低磨损率(10‒20 m^(3)/(N·m)),类富勒烯碳薄膜具有高硬度,能够在摩擦过程中支撑容易“坍塌”的MoS_(2)。结论在摩擦过程中类富勒烯结构因剪切力和Mo的催化作用发生解构现象,引起薄膜中的sp3向sp2转变,并且重建为片状石墨片。MoS_(2)形成了转移膜在摩擦过程中扮演的角色一方面是润滑剂,另一方面是催化剂,作为润滑剂能够改善磨损情况,作为催化剂参与类富勒烯结构的重构过程,获得在真空环境下的低摩擦因数和低磨损性能。Lubrication failure of space moving parts has become a bottleneck restricting the service life and reliability of space technology equipment.At present,aerospace solid lubrication materials used in aerospace equipment are mainly disulfide layered structure compounds,such as molybdenum disulfide,which has a layered hexagonal crystal structure and is a thin layer unit composed of three planar S-Mo-S layers.However,due to the weak interlayer structure,molybdenum disulfide is likely to wear under high loads,so it can not meet the requirements of system durability under high loads in space.Fullerene-like carbon films(FLC)with high hardness and excellent elastic recovery coefficient achieve ultra-low friction(0.008)in atmospheric environments.Fullerene-like carbon films are expected to be widely used as a new type of space solid lubrication films,but the tribological properties of fullerene-like carbon films with various pairs under vacuum are rarely studied.In this paper,fullerene-like carbon films were prepared by plasma enhanced chemical vapor deposition(PECVD).The thickness,structure and mechanical properties of FLC films were studied by scanning electron microscopy(SEM),high-resolution transmission electron microscopy(HRTEM),Raman spectroscopy and nanomechanics.The tribological properties of fullerene-like carbon films with amorphous carbon films(DLC),FLC,steel balls(440C)and MoS_(2) films were investigated by vacuum friction testing machine.Combined with the wear morphology and the Raman and HRTEM structure analysis of transfer films,the friction and wear mechanism of the materials were investigated.The results showed that the friction curves of FLC/DLC friction pairs varied greatly.Although FLC/DLC friction pairs could achieve a lower friction coefficient(0.02),the friction life was short and friction failure occurred quickly.Since FLC or DLC deposited on the surface of 440C was deposited by PECVD,the carbon film deposited on the metal surface usually needed to deposit the transition layer first to enhance the b

关 键 词：真空环境 摩擦 磨损 类富勒烯碳薄膜 二硫化钼 摩擦催化 

分 类 号：TH117[机械工程—机械设计及理论]