TiN/DLC和NiN/DLC涂层的组织结构及摩擦磨损性能  

Microstructure and tribological performance of TiN/DLC and NiN/DLC coatings

作　　者：张树玲 武帅政 杨相栋 马兴华 郭峰 张波[2] ZHANG Shu-ling;WU Shuai-zheng;YANG Xiang-dong;MA Xing-hua;GUO Feng;ZHANG Bo(School of Mechanical and Automotive Engineering,Qingdao University of Technology,Qingdao 266520,China;College of Mechanical Engineering,Ningxia University,Yinchuan 750021,China)

机构地区：[1]青岛理工大学机械与汽车工程学院,山东青岛266520 [2]宁夏大学机械工程学院,宁夏银川750021

出　　处：《材料热处理学报》2024年第10期144-153,共10页Transactions of Materials and Heat Treatment

基　　金：国家自然科学基金(52375189)。

摘　　要：采用磁控溅射沉积技术在316L不锈钢基体上分别沉积了以TiN和NiN为过渡层的类金刚石(Diamond-like carbon,DLC)涂层。采用扫描电镜、拉曼光谱仪、纳米压痕仪、划痕测试仪和摩擦磨损试验机分析了DLC涂层的表面质量、组织结构和摩擦磨损性能。结果表明:NiN/DLC涂层表面颗粒及孔洞等沉积缺陷数量多,Ni和N共同沉积作为中间过渡层时,Ni多以金属单质的形式存在于DLC和基体之间,而由于金属基体结构及Ni的存在,提高了基体和过渡层间的界面匹配性,使得NiN/DLC涂层膜基结合强度高,接合力达到14.91 N;但Ti与N共同沉积作为过渡层时,Ti和C结合形成金属碳化物存在于DLC和基体之间,这有利于涂层密度(1.929 g/cm 3)和硬度的提高;而且高硬度金属碳化物的形成也有利于涂层变形能力的改善,并利于DLC结构的非晶化及促进sp 3-C键的形成。磨擦磨损分析则表明,无论是在干摩擦、去离子水中还是弱酸(pH=5.6的HCl溶液)工况下,NiN/DLC涂层由于硬度低、组织密度低导致涂层的抗摩擦磨损能力和耐腐蚀能力差;而TiN/DLC涂层具有更低的磨擦系数和磨损量,耐磨、抗磨和耐蚀性能优异。以上实验分析说明具有更高硬度的Ti的氮化物和碳化物作为过渡层能够更好地改善DLC涂层结构和摩擦磨损性能,而Ni为过渡层能够有效提高NiN/DLC涂层的膜基结合强度,但涂层磨擦过程中容易脱落失效。Diamond-like carbon(DLC)coatings with TiN and NiN as transition layers were deposited on 316L stainless steel substrate using magnetron sputtering deposition technology.The surface quality,microstructure and tribological performance of the DLC coatings were analyzed by means of scanning electron microscopy,Raman spectroscopy,nanoindentation tester,scratch tester and friction and wear testing machine.The results show that there are many deposition defects such as particles and pores on the surface of NiN/DLC coating,and when Ni and N are co-deposited as intermediate transition layers,Ni mostly exists in the form of metallic elements between DLC and substrate.Due to the structure of the metallic substrate and the presence of Ni,the interface matching between substrate and transition layer is improved,resulting in high bonding strength of the NiN/DLC coating and substrate,with a bonding force of 14.91 N.However,when Ti and N are co-deposited as a transition layer,Ti and C combine to form metal carbides that exist between DLC and the substrate,which is beneficial for improving the coating density(1.929 g/cm 3)and hardness.Moreover,the formation of high hardness metal carbides is beneficial for improving the deformation ability of the coatings,facilitating the amorphization of DLC structures,and promoting the formation of sp 3-C bonds.Friction and wear analysis shows that under dry friction,deionized water,or weak acid(pH=5.6 HCl solution)conditions,the NiN/DLC coating has poor resistance to friction and wear and corrosion due to its low hardness and low density of microstructure.However,the TiN/DLC coating has lower friction coefficient and wear mass,and excellent wear and corrosion resistance.The above experimental analysis shows that nitrides and carbides of Ti with higher hardness as transition layers can better improve the microstructure and friction and wear performance of the DLC coatings,while Ni as transition layer can effectively improve the bonding strength of the NiN/DLC coating,but the coating is prone to

关 键 词：类金刚石涂层 摩擦系数 硬度 结合力 磨损量 

分 类 号：TG174.44[金属学及工艺—金属表面处理]