Design and characterization of a multi-ring nested CMUT array for hydrophone  

作　　者：Licheng Jia Rihui Xue Fansheng Meng 

机构地区：[1]The Key Laboratory of Instrumentation Science and Dynamic Measurement,North University of China,Taiyuan 030051,China

出　　处：《Journal of Semiconductors》2024年第11期58-62,共5页半导体学报（英文版）

基　　金：supported in part by the National Natural Science Foundation of China under Grant 61927807,62320106011,and 62304208;China Postdoctoral Science Foundation under Grant 2023M733277 and2024T170848。

摘　　要：This paper presents the design,fabrication,packaging,and characterization of a high-performance CMUT array.The array,which features rectangular cells fabricated using a sacrificial release process,achieves a receiving sensitivity of-231.44 d B(re:1 V/μPa)with a 40 d B gain.Notably,the CMUT array exhibits a minimal sensitivity variation of just 0.87 d B across a temperature range of 0 to 60°C.Furthermore,the output voltage non-linearity at 1 k Hz is approximately 0.44%.These test results demonstrate that the reception performance of the 67-element CMUT array is superior to that of commercial transducers.The high performance and compact design of this CMUT array underscore its significant commercial potential for hydrophone applications.

关 键 词：cmut array mirco-electro-mechanical systems(mems) receiving sensitivity non-linearity 

分 类 号：TB565.1[交通运输工程—水声工程] TP212[理学—物理]