基于绝缘体上钛酸钡的2μm波段慢波高速电光调制器  

Slow-wave High-speed Electro-optic Modulator Based on Barium Titanate on An Insulator at A Wavelength of 2μm

作　　者：黄通 马如原 刘瑛璇 许天琦 邱阳 赵兴岩 郑少南 钟其泽 董渊 胡挺 HUANG Tong;MA Ruyuan;LIU Yingxuan;XU Tianqi;QIU Yang;ZHAO Xingyan;ZHENG Shaonan;ZHONG Qize;DONG Yuan;HU Ting(School of Microelectronics,Shanghai University,Shanghai 201800,CHN;Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology,Shanghai University,Shanghai 201800,CHN)

机构地区：[1]上海大学微电子学院,上海201800 [2]上海市智能感知芯片技术协同创新中心上海大学,上海201800

出　　处：《半导体光电》2024年第5期693-699,共7页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(62204149,62205193,U23A20356);红外探测国家重点实验室开放课题项目(IRDT-23-08);上海市智能感知芯片技术协同创新中心、上海市汽车智能网联交互芯片与系统重点实验室揭榜挂帅项目.

摘　　要：电光调制器是光通信链路的重要组成部分。随着近红外波段光通信频谱的不断消耗,2μm中红外波段成为拓宽光纤通信频谱的新选择。文章提出了一种2μm波长的基于绝缘体上钛酸钡平台的中红外电光调制器。对钛酸钡脊波导和慢波电极进行了理论分析和结构优化。仿真结果表明,在2μm波长处,当调制长度为5 mm时,所设计的电光调制器拥有较高的调制效率并且实现了较大的电光带宽,其半波电压长度积(V_(π)·L)为0.677 V·cm,3 dB电光带宽为229.6 GHz。Electro-optic modulators are critical components of optical communication systems.With an increasing demand for the near-infrared spectrum in optical communication,the 2μm mid-infrared band has emerged as a promising option for expanding the bandwidth of fiber optic communications.This study proposes a mid-infrared electro-optic modulator based on barium titanate on an insulator platform at a wavelength of 2μm.Theoretical analyses and structural optimizations are performed on the barium titanate ridge waveguide and slow-wave electrode.The simulation results demonstrate that at a wavelength of 2μm and a modulation length of 5 mm,the designed electro-optic modulator exhibits high modulation efficiency and achieves a large electro-optic bandwidth,with a half-wave voltage-length product(V_(π)·L)of 0.677 V·cm and a 3 dB electro-optic bandwidth of 229.6 GHz.

关 键 词：中红外波段 绝缘体上钛酸钡 电光调制器 脊波导 慢波电极 

分 类 号：TN929.1[电子电信—通信与信息系统]