用于管道入侵定位检测的MEMS声传感器  

MEMS Acoustic Sensor for Pipeline Intrusion Location Detection

作　　者：刘涛 豆涵杰 李军 李志浩[1] 张继轩 杨嘉倩 张明洋 牟笑静 LIU Tao;DOU Hanjie;LI Jun;LI Zhihao;ZHANG Jixuan;YANG Jiaqian;ZHANG Mingyang;MU Xiaojing(National Defense Key Discipline laboratory of New Micro-Nano Devices and Systems Technology,Chongqing University,Chongqing 400044,China;The 26th Institute of China Electronic Technology Group Gorporation,Chongqing 400060,China;The 24th Institute of China Electronic Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆400044 [2]中国电子科技集团公司第二十六研究所,重庆400060 [3]中国电子科技集团公司第二十四研究所,重庆400060

出　　处：《压电与声光》2024年第5期634-637,共4页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划(2021YFB2012100)。

摘　　要：管道入侵破坏会造成环境严重污染以及财产的重大损失,基于声学技术的管道破坏定位技术已成为发展趋势。提出了一种基于PMUT的MEMS声传感器,通过氧化铝-环氧树脂填充的方式实现了声阻抗匹配与高可靠性封装。将两个微机电系统(MEMS)声传感器安装在管道入侵定位检测系统中,并敲击管道模拟入侵场景,然后采集管道中传播的声信号并对其进行分析。结果表明,声信号在管道中的传播速度为2449 m/s,基于声信号的管道入侵定位检测方法的定位相对误差小于2%,证明了MEMS声传感器用于管道入侵定位监测的可行性。Pipeline intrusion and damage will cause serious environmental pollution and significant property losses.Pipeline damage positioning technology based on acoustic technology has become a trend in technological development.This paper proposes a MEMS acoustic sensor based on PMUT,which achieves acoustic impedance matching and high-reliability packaging through Alumina-Epoxy Resin filling.Two MEMS acoustic sensors are installed in the pipeline intrusion positioning detection system,and the pipeline is knocked to simulate the intrusion scene,and then the acoustic signal propagated in the pipeline is collected and analyzed.The results show that the propagation speed of the acoustic signal in the pipeline is 2449 m/s,and the relative positioning error of the pipeline intrusion positioning detection method based on acoustic signals is less than 2%,which proves the feasibility of MEMS acoustic sensors for pipeline intrusion positioning monitoring.

关 键 词：MEMS声传感器 PMUT 管道入侵定位 声探测 声谱 

分 类 号：TN384[电子电信—物理电子学] TN64TN912