基于MEMS声发射传感器的齿轮故障检测系统  

Gear Fault Detection System Based on MEMS Acoustic Emission Sensor

作　　者：张继轩 豆涵杰 刘涛 李志浩 杨晓 张明洋 毛宇宸 牟笑静 ZHANG Jixuan;DOU Hanjie;LIU Tao;LI Zhihao;YANG Xiao;ZHANG Mingyang;MAO Yuchen;MU Xiaojing(Key Laboratory of Optoelectronic Technology&Systems of Ministry of Education,Chongqing University,Chongqing 400044,China;The 24th Institute of China Electronic Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400044 [2]中国电子科技集公司第二十四研究所,重庆400060

出　　处：《压电与声光》2024年第5期638-643,共6页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划(2021YFB2012100)。

摘　　要：声发射传感器广泛应用于装备实时健康检测,而传统使用的压电陶瓷换能器存在体积大、能耗高、难集成及成本高等问题,因此设计了基于ScAlN的六边形压电薄膜声发射传感器。该传感器的体积为Φ18 mm×6 mm,在40~500 kHz带宽内,其表面波和纵波灵敏度均高于60 dB[Ref.V/(m/s)]。通过匹配层设计和封装后,搭建了齿轮故障检测系统,能有效区分正常齿轮和断齿信号。测试结果表明,基于微机电系统(MEMS)的压电薄膜声发射传感器可同时兼顾高灵敏度和微型化,在齿轮故障诊断方面具有较高的可靠性和准确性。Acoustic emission sensors are widely used in real-time health detection of equipment.The traditional piezoelectric ceramic transducers have the problems of large volume,high energy consumption,difficult integration and high cost.In this paper,a hexagonal piezoelectric film acoustic emission sensor based on ScAlN is designed.The volume isΦ18 mm×6 mm.The sensitivity of surface wave and longitudinal wave is higher than 60 dB[Ref.V/(m/s)]in the bandwidth of 40-500 kHz.After the design and packaging of the matching layer,the gear fault detection system is built,which can effectively distinguish the normal gear and the broken tooth signal.The test results show that the piezoelectric film acoustic emission sensor based on Micro-Electro-Mechanical Systems(MEMS)has both high sensitivity and miniaturization,and has high reliability and accuracy in gear fault diagnosis.

关 键 词：微机电系统(MEMS) 压电薄膜超声换能器 声发射 声阻抗匹配 齿轮故障检测 

分 类 号：TN64[电子电信—电路与系统] TN384