宽带温度补偿型声表面波滤波器的设计与优化  

Design and Optimization of Wideband Temperature-Compensated Surface Acoustic Wave Filters

作　　者：谭发曾 李桦林 马晋毅[1] 陈文远 胡明浪 杜雪松[1] 詹雪奎 TAN Fazeng;LI Hualin;MA Jinyi;CHEN Wenyuan;HU Minglang;DU Xuesong;ZHAN Xuekui(The 26th Institute of China Electronic Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2024年第5期651-654,669,共5页Piezoelectrics & Acoustooptics

摘　　要：提出了一种宽带温度补偿型声表面波滤波器的设计方法。通过研究铌酸锂衬底不同欧拉角、不同电极材料和厚度对声表面波谐振器频率响应和杂散抑制的影响,确定了宽带温度补偿型声表面波滤波器的最佳切向和电极结构。所制备的宽带声表面波滤波器的温度系数优于-18.9×10^(-6)/℃,-3 dB相对带宽为7.84%,插入损耗为0.93 dB,展现出良好的带外抑制。This paper presents a design method for wideband temperature-compensated surface-acoustic-wave filters.By analyzing the effects of varying Euler angles of LiNbO_(3) substrates,distinct electrode materials,and thicknesses on the surface-acoustic-wave resonator frequency response and spurious wave suppression,the most favorable Euler angles and electrode configuration for a wideband temperature-compensated surface-acoustic-wave filter are determined.The fabricated wideband temperature-compensated surface-acoustic-wave filter exhibits a temperature coefficient greater than-18.9×10^(-6)/℃,a-3 dB relative bandwidth of 7.84%,and an insertion loss of 0.93 dB;additionally,it demonstrates effective out-of-band rejection.

关 键 词：声表面波 滤波器 宽带 温度补偿 

分 类 号：TN65[电子电信—电路与系统]