基于光纤法布里-珀罗干涉仪的高灵敏微压传感技术研究  

Research on Highly Sensitive Micro-Pressure Sensing Technology Based on Fiber-Optic Fabry-Pérot Interferometer

作　　者：杨迪 邢美华 刘钦朋 刘波 闫诚 YANG Di;XING Meihua;LIU Qinpeng;LIU Bo;YAN Cheng(School of Science,Xi’an Shiyou University,Xi’an 710065,China;Shaanxi Engineering Research Center of Oil and Gas Resource Optical Fiber Detection,Xi’an 710065,China;Shaanxi Key Laboratory of Measurement and Control Technology for Oil and Gas Wells,Xi’an 710065,China;Key Laboratory of CNPC—Research Laboratory for Optical Fiber Dynamic Detection of Oil Reservoirs,Xi’an 710065,China)

机构地区：[1]西安石油大学理学院,陕西西安710065 [2]陕西省油气资源光纤探测工程技术研究中心,陕西西安710065 [3]陕西省油气井测控技术重点实验室,陕西西安710065 [4]CNPC重点实验室——油藏光纤动态检测研究室,陕西西安710065

出　　处：《压电与声光》2024年第5期787-793,800,共8页Piezoelectrics & Acoustooptics

基　　金：陕西省自然科学基础研究计划项目(2024JC-YBMS-530);西安石油大学研究生创新与实践能力培养项目(YCS23113097)。

摘　　要：光纤传感器在电池安全监测领域的应用日益增多。针对储能电池内部气压变化微小难以测量的问题,基于光纤法布里-珀罗(Fabry-Pérot,FP)腔体端面镀膜的结构模型,研讨了膜厚、有效半径和腔长之间的关系,深入探究了三者之间的相互制约及理论基础,设计了一种小型化、高灵敏度和高精度的光纤微压传感器。制备了气压灵敏度-239.836 nm/MPa、线性度0.998的微压传感器,其在100 kPa压强范围内表现出良好的线性和稳定性。该传感器结构紧凑、制作简单且成本低,具备较高的灵敏度和优异的压强响应特性。Fiber optic sensors are increasingly used in the field of battery safety monitoring.Because of the difficulty measuring the tiny air pressure changes inside an energy storage battery,this study utilized a structural model of a fiber optic Fabry-Pérot(FP)cavity end-face coating.The relationships between the film thickness,effective radius,and cavity length were studied,and their mutual constraints and theoretical foundations were explored in depth.A miniaturized fiber optic micro-pressure sensor with high sensitivity and high accuracy was designed.This micro-pressure sensor had a sensitivity of-239.836 nm/MPa and linearity of 0.998.It showed good linearity and stability in a pressure range of 100 kPa.The sensor was compact,simple,and inexpensive to fabricate and had high sensitivity and excellent pressure response characteristics.

关 键 词：光纤压强传感器 光纤法布里-珀罗干涉 聚二甲基硅氧烷(PDMS) 

分 类 号：TN253[电子电信—物理电子学]