基于开槽法的超声应力换能器LCR波检测深度校准研究  

Calibration of Detecting Depth of LCR Wave of Ultrasonic Stress Transducer Based on Slotting Method

作　　者：易畅 姚磊 郑慧峰 牛淼 吴德林 高申平 俞醒言 YI Chang;YAO Lei;ZHENG Huifeng;NIU Miao;WU Delin;GAO Shenping;YU Xingyan(College of Metrological Technology and Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;Zhejiang Institute of Quality Sciences,Hangzhou,Zhejiang 310018,China;Key Laboratory of Acoustics and Vibration Applied Measuring Technology,State Administration for Market Regulation,Hangzhou,Zhejiang 310018,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]浙江省质量科学研究院,浙江杭州310018 [3]国家市场监督管理总局重点实验室(声学振动应用测量技术),浙江杭州310018

出　　处：《计量学报》2024年第10期1541-1548,共8页Acta Metrologica Sinica

基　　金：市场监督管理总局计划(KJLJ202310,2022MK046,2023MK048);浙江省市场监督管理局科技计划(CY2022216,CY2022001,ZD2024007);浙江省重点研发计划(2022C01002);浙江省基础公益计划(LGF22A040005,TGC23A040003);浙江省属高校基本科研业务费专项资金资助(2023YW89,2023YW112)。

摘　　要：基于开槽法开展了超声应力换能器LCR波检测深度校准研究。其原理是当开槽深度超过LCR波渗透深度时,波的传播会受开槽的影响。首先,采用弹性波时域显式物理场,建立了LCR波渗透深度的有限元研究模型,仿真了LCR波的产生及传播过程,并且分析了槽型对LCR波及检测深度的影响。通过声时差与幅值变化幅度2个特征参数,得出矩形槽比梯形槽更适合用于校准换能器的检测深度。在此基础上,开展不同频率换能器检测深度校准试验,制定不同深度的矩形槽试块,分别校准了2.5、5、7.5 MHz频率下的LCR波渗透深度,并对2.5 MHz的实验结果开展不确定度评定。结果表明:2.5 MHz换能器的LCR波检测深度10次测量的平均值为2.85 mm,与标称值的误差为0.15 mm,合成标准不确定度为0.29 mm。研究结果对于校准不同频率下换能器检测深度及提高应力测量空间分辨率具有意义,并且可为LCR波渗透深度的经验公式提供实验参考。The research on depth calibration of LCR wave detection of ultrasonic stress transducer was carried out based on the slotting method.The principle is that when the slotting depth exceeds the LCR wave penetration depth,the wave propagation will be affected by the slotting.In order to accurately characterize the detection depth(LCR wave penetration depth)of ultrasonic stress transducers at different frequencies and improve the spatial resolution of stress measurement,a study on LCR wave detection depth calibration of ultrasonic stress transducers based on slotting method is carried out.The slotting calibration method is based on the principle that when the slotting depth exceeds the penetration depth of LCR waves,the propagation of waves will be affected by the slotting.Firstly,a finite element research model for the penetration depth of LCR waves is established by using a physical field of elastic waves with time domain.The generation and propagation process of LCR waves are simulated,and the influence of groove shapes on LCR waves and detection depth are analyzed.By analyzing the two characteristic parameters of sound time difference and amplitude change,it is concluded that rectangular slot is more suitable for the detection depth calibration.Based on this,detection depth calibration experiments are conducted of transducers at frequencies of 2.5,5,and 7.5 MHz.The uncertainty of the experimental results at 2.5 MHz is evaluated.The results show that the average value of ten measurements of LCR wave detection depth for a 2.5 MHz transducer is 2.85 mm,with an error of 0.15 mm from the nominal value,and the combined standard uncertainty is 0.29 mm.The research results are meaningful for calibrating the detection depth of transducers at different frequencies and improving the spatial resolution of stress measurement,and can provide experimental reference for the empirical formula of LCR wave penetration depth.

关 键 词：声学计量 超声波测量法 临界折射纵波 检测深度 开槽法 校准系统 

分 类 号：TB95[一般工业技术—计量学]