镍基合金上FeCrAl薄膜应变计的制备与性能  

Preparation and Properties of FeCrAl Thin Film Strain Gauge on Nickel-based Alloy

作　　者：陈长源 周世威 周枳仲 蒋书文[1] Chen Changyuan;Zhou Shiwei;Zhou Zhizhong;Jiang Shuwen*(State Key Laboratory of Electronic Thin Films and Integrated Devices,School of integrated Circuit Science and Engineering,University of Electronic Science and Technology of China,Chengdu Sichuan 611731)

机构地区：[1]电子科技大学集成电路科学与工程学院电子薄膜与集成器件全国重点实验室,四川成都611731

出　　处：《中国仪器仪表》2024年第11期69-73,共5页China Instrumentation

基　　金：国家重点研发计划(2021YFB3801700);航空科学基金(20200046080001)。

摘　　要：薄膜应变计是航空发动机涡轮叶片应变测量的可靠选择。本文以FeCrAl合金为敏感材料,在镍基合金DD6上制备了多层薄膜材料体系的FeCrAl薄膜应变计,并测试了不同温度环境下应变计的应变性能。结果表明,20℃,200℃,400℃和600℃时的应变灵敏系数为2.41,2.68,3.16和3.70;200℃,400℃和600℃的电阻温度系数为567.5ppm/℃,534.1ppm/℃,517.3ppm/℃,电阻漂移率为0.00118h^(-1),0.00167h^(-1),0.00181h^(-1)。Thin film strain gauge is a reliable choice for strain measurement of aeroengine turbine blades.The FeCrAl thin film strain gauge was prepared on nickel-based alloy DD6 with FeCrAl alloy as the sensitive material,and the strain performance of strain gauge was tested at different temperatures.The results show that the gauge factors at 20℃,200℃,400℃and 600℃are 2.41,2.68,3.16 and 3.70.The temperature coefficients of resistance at 200℃,400℃and 600℃are 567.5,534.1 and 517.3ppm/℃,and the drift rate is 0.00118h^(-1),0.00167h^(-1),0.00181h^(-1).

关 键 词：薄膜应变计 FeCrAl合金 应变灵敏系数 电阻温度系数 电阻漂移率 

分 类 号：V231.9[航空宇航科学与技术—航空宇航推进理论与工程]