垂直腔面发射激光器阵列的热设计研究进展  

Advances in thermal design of vertical cavity surface emitting laser array

作　　者：金冬月[1] 洪福临 张万荣 张洪源 王毅华 王焕哲 王楷尧 关宝璐[1] JIN Dongyue;HONG Fulin;ZHANG Wanrong;ZHANG Hongyuan;WANG Yihua;WANG Huanzhe;WANG Kaiyao;GUAN Baolu(School of Information Science and Technology,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京工业大学信息科学技术学院,北京100124

出　　处：《激光技术》2024年第6期777-789,共13页Laser Technology

基　　金：国家自然科学基金资助项目(60908012,61006059,61575008,61774012,61775007,61901010);北京市自然科学基金资助项目(4172011);激光器件技术重点实验室开放基金资助项目(KLLDT202306)。

摘　　要：垂直腔面发射激光器(VCSEL)通常采用由小尺寸发光单元并联的2维阵列结构来提高输出光功率、改善激光光束质量,然而随着芯片尺寸不断缩小以及阵列集成度不断提高,由VCSEL单元自身功耗引起的自加热效应及各单元之间的热耦合效应将导致VCSEL阵列结温急剧上升,在热-光-电反馈作用下,将严重制约VCSEL阵列的光学性能及热可靠性,对VCSEL阵列热设计提出了迫切要求。在阐明VCSEL阵列产热机理的基础上,从热-光-电模型建立、热设计方法两方面归纳总结了VCSEL阵列热设计最新进展,并对热设计发展趋势进行了展望。Vertical-cavity surface-emitting laser(VCSEL)usually adopt a 2-D array structure with small-sized light-emitting cells in parallel to increase the output optical power and to improve the laser beam quality.However,with the down scaling of the chip size and the increasing of the array integration,the self-heating effect caused by the power dissipation of the VCSEL cell and the thermal coupling effect among VCSEL cells will lead to a sharp increase in the junction temperature of the VCSEL array.Due to the effect of thermal-opto-electro feedback,the optical performance and thermal reliability of the VCSEL array will be limited seriously,which propose urgent requirements for the thermal design of the VCSEL array.Based on the heat generation mechanism of VSCEL array,latest development of VCSEL array thermal design was reviewed in detail from the aspects of thermal-opto-electro modeling and thermal design methodology.The development trend of thermal design in VCSEL array was also prospected.

关 键 词：激光器 2维阵列 热-光-电模型 热设计 

分 类 号：TN248.4[电子电信—物理电子学]